Matches in SemOpenAlex for { <https://semopenalex.org/work/W2021747589> ?p ?o ?g. }
- W2021747589 endingPage "7678" @default.
- W2021747589 startingPage "7665" @default.
- W2021747589 abstract "Lithographic feature size requirements have approached a few radius of gyration of photoresist polymers used in thin-film patterning. Furthermore, the feature dimensions are commensurate with the photoacid diffusion length that defines the underlying latent image. Smaller imaging building blocks may enable reduced feature sizes; however, resolution limits are also dependent upon the spatial extent of the photoacid-catalyzed reaction diffusion front and subsequent dissolution mechanism. The reaction-diffusion front was characterized by neutron reflectivity for ccc stereoisomer-purified, deuterium-labeled tert-butoxycarbonyloxy calix[4]resorcinarene molecular resists. The spatial extent of the reaction front exceeds the size of the molecular resist with an effective diffusion constant of (0.13 ± 0.06) nm(2)/s for reaction times longer than 60 s, with the maximum at shorter times. Comparison to a mean-field reaction-diffusion model shows that a photoacid trapping process provides bounds to the spatial and extent of reaction via a reaction-limited mechanism whereas the ratio of the reaction rate to trapping rate constants recovers the effective diffusion peak. Under the ideal step-exposure conditions, surface roughness was observed after either positive- or negative-tone development. However, negative-tone development follows a surface-restructuring mechanism rather than etch-like dissolution in positive-tone development." @default.
- W2021747589 created "2016-06-24" @default.
- W2021747589 creator A5023243377 @default.
- W2021747589 creator A5027741558 @default.
- W2021747589 creator A5042591344 @default.
- W2021747589 creator A5042852895 @default.
- W2021747589 creator A5053232971 @default.
- W2021747589 creator A5058207698 @default.
- W2021747589 creator A5072858563 @default.
- W2021747589 date "2012-05-11" @default.
- W2021747589 modified "2023-10-16" @default.
- W2021747589 title "Neutron Reflectivity Characterization of the Photoacid Reaction-Diffusion Latent and Developed Images of Molecular Resists for Extreme Ultraviolet Lithography" @default.
- W2021747589 cites W1971852702 @default.
- W2021747589 cites W1972682435 @default.
- W2021747589 cites W1976573446 @default.
- W2021747589 cites W1979668638 @default.
- W2021747589 cites W1989089234 @default.
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- W2021747589 cites W1994131839 @default.
- W2021747589 cites W1996823627 @default.
- W2021747589 cites W1997431141 @default.
- W2021747589 cites W1998419819 @default.
- W2021747589 cites W1998472610 @default.
- W2021747589 cites W1999252224 @default.
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- W2021747589 cites W2004170986 @default.
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- W2021747589 cites W2011755542 @default.
- W2021747589 cites W2012265558 @default.
- W2021747589 cites W2013446260 @default.
- W2021747589 cites W2017058663 @default.
- W2021747589 cites W2018344874 @default.
- W2021747589 cites W2018509656 @default.
- W2021747589 cites W2033205388 @default.
- W2021747589 cites W2035252072 @default.
- W2021747589 cites W2036929567 @default.
- W2021747589 cites W2038076296 @default.
- W2021747589 cites W2038482614 @default.
- W2021747589 cites W2040463729 @default.
- W2021747589 cites W2043083862 @default.
- W2021747589 cites W2058524532 @default.
- W2021747589 cites W2060086937 @default.
- W2021747589 cites W2061733041 @default.
- W2021747589 cites W2065568050 @default.
- W2021747589 cites W2066958391 @default.
- W2021747589 cites W2067697261 @default.
- W2021747589 cites W2070059032 @default.
- W2021747589 cites W2072163269 @default.
- W2021747589 cites W2073669064 @default.
- W2021747589 cites W2076020091 @default.
- W2021747589 cites W2076617639 @default.
- W2021747589 cites W2078464330 @default.
- W2021747589 cites W2079917690 @default.
- W2021747589 cites W2081260044 @default.
- W2021747589 cites W2081372872 @default.
- W2021747589 cites W2083672051 @default.
- W2021747589 cites W2083894696 @default.
- W2021747589 cites W2085985801 @default.
- W2021747589 cites W2087648283 @default.
- W2021747589 cites W2088261573 @default.
- W2021747589 cites W2092723172 @default.
- W2021747589 cites W2094192624 @default.
- W2021747589 cites W2095211560 @default.
- W2021747589 cites W2102265851 @default.
- W2021747589 cites W2103206227 @default.
- W2021747589 cites W2133946070 @default.
- W2021747589 cites W2142507821 @default.
- W2021747589 cites W2144505424 @default.
- W2021747589 cites W2151965567 @default.
- W2021747589 cites W2163697519 @default.
- W2021747589 cites W2165787070 @default.
- W2021747589 cites W2168663371 @default.
- W2021747589 cites W2170797104 @default.
- W2021747589 cites W2172253633 @default.
- W2021747589 cites W2342293295 @default.
- W2021747589 cites W2486119844 @default.
- W2021747589 cites W4213207713 @default.
- W2021747589 cites W4254056711 @default.
- W2021747589 doi "https://doi.org/10.1021/la301311m" @default.
- W2021747589 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/22577835" @default.
- W2021747589 hasPublicationYear "2012" @default.
- W2021747589 type Work @default.
- W2021747589 sameAs 2021747589 @default.
- W2021747589 citedByCount "11" @default.
- W2021747589 countsByYear W20217475892012 @default.
- W2021747589 countsByYear W20217475892013 @default.
- W2021747589 countsByYear W20217475892014 @default.
- W2021747589 countsByYear W20217475892017 @default.
- W2021747589 countsByYear W20217475892018 @default.
- W2021747589 countsByYear W20217475892019 @default.
- W2021747589 countsByYear W20217475892021 @default.
- W2021747589 countsByYear W20217475892023 @default.
- W2021747589 crossrefType "journal-article" @default.
- W2021747589 hasAuthorship W2021747589A5023243377 @default.
- W2021747589 hasAuthorship W2021747589A5027741558 @default.
- W2021747589 hasAuthorship W2021747589A5042591344 @default.