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• W2021754278 endingPage "473" @default.
• W2021754278 startingPage "463" @default.
• W2021754278 abstract "This research is focused on the feasibility of using infrared temperature measurements on the exterior of a chemical vapor deposition (CVD) reactor to ascertain both real-time information on the operating characteristics of a CVD system and provide data which could be post-processed to provide quantitative information for research and development on CVD processes. Infrared thermography techniques were used to measure temperatures on a horizontal CVD reactor of rectangular cross section which were correlated with the internal gas flow field, as measured with the laser velocimetry (LV) techniques. For the reactor tested, thermal profiles were well correlated with the gas flow field inside the reactor. Correlations are presented for nitrogen and hydrogen carrier gas flows. The infrared data were available to the operators in real time with sufficient sensitivity to the internal flow field so that small variations such as misalignment of the reactor inlet could be observed. The same data were post-processed to yield temperature measurements at known locations on the reactor surface. For the experiments described herein, temperatures associated with approximately 3.3 mm2 areas on the reactor surface were obtained with a precision of ±2°C. These temperature measurements were well suited for monitoring a CVD production reactor, development of improved thermal boundary conditions for use in CFD models of reactors, and for verification of expected thermal conditions." @default.
• W2021754278 created "2016-06-24" @default.
• W2021754278 creator A5049637958 @default.
• W2021754278 creator A5059650015 @default.
• W2021754278 creator A5062208413 @default.
• W2021754278 creator A5083330242 @default.
• W2021754278 date "1998-05-01" @default.
• W2021754278 modified "2023-09-27" @default.
• W2021754278 title "Evaluation of infrared thermography as a diagnostic tool in CVD applications" @default.
• W2021754278 cites W1485962407 @default.
• W2021754278 cites W1967681233 @default.
• W2021754278 cites W2003200634 @default.
• W2021754278 cites W2048140520 @default.
• W2021754278 cites W2056960520 @default.
• W2021754278 cites W2061281859 @default.
• W2021754278 cites W2063523942 @default.
• W2021754278 cites W2064220408 @default.
• W2021754278 cites W2071225091 @default.
• W2021754278 cites W2080344425 @default.
• W2021754278 cites W2080640740 @default.
• W2021754278 cites W2139973256 @default.
• W2021754278 cites W2140588660 @default.
• W2021754278 doi "https://doi.org/10.1016/s0022-0248(97)00818-x" @default.
• W2021754278 hasPublicationYear "1998" @default.
• W2021754278 type Work @default.
• W2021754278 sameAs 2021754278 @default.
• W2021754278 citedByCount "10" @default.
• W2021754278 countsByYear W20217542782013 @default.
• W2021754278 countsByYear W20217542782014 @default.
• W2021754278 countsByYear W20217542782018 @default.
• W2021754278 countsByYear W20217542782022 @default.
• W2021754278 countsByYear W20217542782023 @default.
• W2021754278 crossrefType "journal-article" @default.
• W2021754278 hasAuthorship W2021754278A5049637958 @default.
• W2021754278 hasAuthorship W2021754278A5059650015 @default.
• W2021754278 hasAuthorship W2021754278A5062208413 @default.
• W2021754278 hasAuthorship W2021754278A5083330242 @default.
• W2021754278 hasConcept C108213311 @default.
• W2021754278 hasConcept C113196181 @default.
• W2021754278 hasConcept C116915560 @default.
• W2021754278 hasConcept C120665830 @default.
• W2021754278 hasConcept C121332964 @default.
• W2021754278 hasConcept C127413603 @default.
• W2021754278 hasConcept C151730666 @default.
• W2021754278 hasConcept C153294291 @default.
• W2021754278 hasConcept C158355884 @default.
• W2021754278 hasConcept C178790620 @default.
• W2021754278 hasConcept C185592680 @default.
• W2021754278 hasConcept C192562407 @default.
• W2021754278 hasConcept C202444582 @default.
• W2021754278 hasConcept C204530211 @default.
• W2021754278 hasConcept C2779222261 @default.
• W2021754278 hasConcept C2816523 @default.
• W2021754278 hasConcept C33923547 @default.
• W2021754278 hasConcept C39432304 @default.
• W2021754278 hasConcept C43617362 @default.
• W2021754278 hasConcept C49040817 @default.
• W2021754278 hasConcept C512968161 @default.
• W2021754278 hasConcept C57410435 @default.
• W2021754278 hasConcept C64297162 @default.
• W2021754278 hasConcept C72293138 @default.
• W2021754278 hasConcept C86803240 @default.
• W2021754278 hasConcept C9652623 @default.
• W2021754278 hasConcept C97355855 @default.
• W2021754278 hasConceptScore W2021754278C108213311 @default.
• W2021754278 hasConceptScore W2021754278C113196181 @default.
• W2021754278 hasConceptScore W2021754278C116915560 @default.
• W2021754278 hasConceptScore W2021754278C120665830 @default.
• W2021754278 hasConceptScore W2021754278C121332964 @default.
• W2021754278 hasConceptScore W2021754278C127413603 @default.
• W2021754278 hasConceptScore W2021754278C151730666 @default.
• W2021754278 hasConceptScore W2021754278C153294291 @default.
• W2021754278 hasConceptScore W2021754278C158355884 @default.
• W2021754278 hasConceptScore W2021754278C178790620 @default.
• W2021754278 hasConceptScore W2021754278C185592680 @default.
• W2021754278 hasConceptScore W2021754278C192562407 @default.
• W2021754278 hasConceptScore W2021754278C202444582 @default.
• W2021754278 hasConceptScore W2021754278C204530211 @default.
• W2021754278 hasConceptScore W2021754278C2779222261 @default.
• W2021754278 hasConceptScore W2021754278C2816523 @default.
• W2021754278 hasConceptScore W2021754278C33923547 @default.
• W2021754278 hasConceptScore W2021754278C39432304 @default.
• W2021754278 hasConceptScore W2021754278C43617362 @default.
• W2021754278 hasConceptScore W2021754278C49040817 @default.
• W2021754278 hasConceptScore W2021754278C512968161 @default.
• W2021754278 hasConceptScore W2021754278C57410435 @default.
• W2021754278 hasConceptScore W2021754278C64297162 @default.
• W2021754278 hasConceptScore W2021754278C72293138 @default.
• W2021754278 hasConceptScore W2021754278C86803240 @default.
• W2021754278 hasConceptScore W2021754278C9652623 @default.
• W2021754278 hasConceptScore W2021754278C97355855 @default.
• W2021754278 hasIssue "3-4" @default.
• W2021754278 hasLocation W20217542781 @default.
• W2021754278 hasOpenAccess W2021754278 @default.
• W2021754278 hasPrimaryLocation W20217542781 @default.
• W2021754278 hasRelatedWork W2013897283 @default.
• W2021754278 hasRelatedWork W2326936262 @default.
• W2021754278 hasRelatedWork W2388833552 @default.

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