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- W2021823598 abstract "An approach to parameter sensitivity methodology for OPC modeling is enhanced, automated, and applied to generateproduction-quality models for a 32-nm logic node poly layer. Two parameter sensitivity models are generated andcompared to a baseline model from the same experimental dataset. The three models are thoroughly investigated todemonstrate that parameter sensitivity can enhance advanced OPC models with essentially no impact on the timerequired for model optimization. Results also indicate that parameter sensitivity, if used improperly, can decrease modelquality." @default.
- W2021823598 created "2016-06-24" @default.
- W2021823598 creator A5021646876 @default.
- W2021823598 creator A5044134459 @default.
- W2021823598 date "2008-05-30" @default.
- W2021823598 modified "2023-09-23" @default.
- W2021823598 title "OPC model enhancement using parameter sensitivity methodology" @default.
- W2021823598 doi "https://doi.org/10.1117/12.793030" @default.
- W2021823598 hasPublicationYear "2008" @default.
- W2021823598 type Work @default.
- W2021823598 sameAs 2021823598 @default.
- W2021823598 citedByCount "1" @default.
- W2021823598 crossrefType "proceedings-article" @default.
- W2021823598 hasAuthorship W2021823598A5021646876 @default.
- W2021823598 hasAuthorship W2021823598A5044134459 @default.
- W2021823598 hasConcept C105795698 @default.
- W2021823598 hasConcept C11413529 @default.
- W2021823598 hasConcept C127413603 @default.
- W2021823598 hasConcept C167928553 @default.
- W2021823598 hasConcept C186060115 @default.
- W2021823598 hasConcept C21200559 @default.
- W2021823598 hasConcept C24326235 @default.
- W2021823598 hasConcept C2983447341 @default.
- W2021823598 hasConcept C33923547 @default.
- W2021823598 hasConcept C41008148 @default.
- W2021823598 hasConcept C73586568 @default.
- W2021823598 hasConcept C86803240 @default.
- W2021823598 hasConceptScore W2021823598C105795698 @default.
- W2021823598 hasConceptScore W2021823598C11413529 @default.
- W2021823598 hasConceptScore W2021823598C127413603 @default.
- W2021823598 hasConceptScore W2021823598C167928553 @default.
- W2021823598 hasConceptScore W2021823598C186060115 @default.
- W2021823598 hasConceptScore W2021823598C21200559 @default.
- W2021823598 hasConceptScore W2021823598C24326235 @default.
- W2021823598 hasConceptScore W2021823598C2983447341 @default.
- W2021823598 hasConceptScore W2021823598C33923547 @default.
- W2021823598 hasConceptScore W2021823598C41008148 @default.
- W2021823598 hasConceptScore W2021823598C73586568 @default.
- W2021823598 hasConceptScore W2021823598C86803240 @default.
- W2021823598 hasLocation W20218235981 @default.
- W2021823598 hasOpenAccess W2021823598 @default.
- W2021823598 hasPrimaryLocation W20218235981 @default.
- W2021823598 hasRelatedWork W1500599223 @default.
- W2021823598 hasRelatedWork W1556789190 @default.
- W2021823598 hasRelatedWork W1926837509 @default.
- W2021823598 hasRelatedWork W2016627057 @default.
- W2021823598 hasRelatedWork W2019851564 @default.
- W2021823598 hasRelatedWork W2036391671 @default.
- W2021823598 hasRelatedWork W2044598067 @default.
- W2021823598 hasRelatedWork W2045059345 @default.
- W2021823598 hasRelatedWork W2047736855 @default.
- W2021823598 hasRelatedWork W2058325439 @default.
- W2021823598 hasRelatedWork W2077701805 @default.
- W2021823598 hasRelatedWork W2086101719 @default.
- W2021823598 hasRelatedWork W2112888559 @default.
- W2021823598 hasRelatedWork W2127508758 @default.
- W2021823598 hasRelatedWork W2327248983 @default.
- W2021823598 hasRelatedWork W2375529890 @default.
- W2021823598 hasRelatedWork W2380502051 @default.
- W2021823598 hasRelatedWork W2423764960 @default.
- W2021823598 hasRelatedWork W2461032783 @default.
- W2021823598 hasRelatedWork W2460454395 @default.
- W2021823598 isParatext "false" @default.
- W2021823598 isRetracted "false" @default.
- W2021823598 magId "2021823598" @default.
- W2021823598 workType "article" @default.