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- W2021863245 abstract "An apparatus is described for the rapid and reliable measurement of the angular evaporation characteristics of sources. It consists of a moving and a stationary quartz crystal evaporation rate monitor, and it can be operated at any chosen azimuth angle. The instrument has been used to demonstrate the effect of source design, rate of evaporation, external obstructions, and evaporant material on the angular evaporation characteristics of high rate, high capacity evaporation sources." @default.
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- W2021863245 date "1983-07-01" @default.
- W2021863245 modified "2023-10-17" @default.
- W2021863245 title "Measurements of angular evaporation characteristics of sources" @default.
- W2021863245 doi "https://doi.org/10.1116/1.572030" @default.
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