Matches in SemOpenAlex for { <https://semopenalex.org/work/W2021864765> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2021864765 endingPage "2043" @default.
- W2021864765 startingPage "2041" @default.
- W2021864765 abstract "Abstract We report on a new planetary hotwall research system with independent control of the ceiling and susceptor temperatures. This allows a study of the influence of an actively heated ceiling during a MOCVD process. It was found that the temperature profile across the substrate becomes more uniform when the ceiling temperature is increased while maintaining the same susceptor surface temperature. The parasitic coating on the ceiling was found to be stable and no source of particles up to 1050 °C. The influence of the ceiling temperature on the depletion profile and the possibility to manipulate it was investigated. Good thickness homogeneity of 1.35% (1·σ) on a 4″ sapphire wafer was achieved with excellent XRD results of 206 arcsec for the (0002) reflex and 272 arcsec for the (10‐12) reflex for a 4.7 µm thick GaN film. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W2021864765 created "2016-06-24" @default.
- W2021864765 creator A5004356743 @default.
- W2021864765 creator A5010711349 @default.
- W2021864765 creator A5022414227 @default.
- W2021864765 creator A5038073340 @default.
- W2021864765 creator A5038713443 @default.
- W2021864765 creator A5042867835 @default.
- W2021864765 creator A5046505569 @default.
- W2021864765 creator A5051986676 @default.
- W2021864765 creator A5057118900 @default.
- W2021864765 creator A5085668656 @default.
- W2021864765 creator A5088350038 @default.
- W2021864765 date "2011-05-09" @default.
- W2021864765 modified "2023-09-24" @default.
- W2021864765 title "Growth of GaN in a planetary MOCVD hotwall system" @default.
- W2021864765 doi "https://doi.org/10.1002/pssc.201001002" @default.
- W2021864765 hasPublicationYear "2011" @default.
- W2021864765 type Work @default.
- W2021864765 sameAs 2021864765 @default.
- W2021864765 citedByCount "3" @default.
- W2021864765 countsByYear W20218647652012 @default.
- W2021864765 countsByYear W20218647652013 @default.
- W2021864765 countsByYear W20218647652014 @default.
- W2021864765 crossrefType "journal-article" @default.
- W2021864765 hasAuthorship W2021864765A5004356743 @default.
- W2021864765 hasAuthorship W2021864765A5010711349 @default.
- W2021864765 hasAuthorship W2021864765A5022414227 @default.
- W2021864765 hasAuthorship W2021864765A5038073340 @default.
- W2021864765 hasAuthorship W2021864765A5038713443 @default.
- W2021864765 hasAuthorship W2021864765A5042867835 @default.
- W2021864765 hasAuthorship W2021864765A5046505569 @default.
- W2021864765 hasAuthorship W2021864765A5051986676 @default.
- W2021864765 hasAuthorship W2021864765A5057118900 @default.
- W2021864765 hasAuthorship W2021864765A5085668656 @default.
- W2021864765 hasAuthorship W2021864765A5088350038 @default.
- W2021864765 hasConcept C110738630 @default.
- W2021864765 hasConcept C119857082 @default.
- W2021864765 hasConcept C120665830 @default.
- W2021864765 hasConcept C121332964 @default.
- W2021864765 hasConcept C142259097 @default.
- W2021864765 hasConcept C143025027 @default.
- W2021864765 hasConcept C159985019 @default.
- W2021864765 hasConcept C160671074 @default.
- W2021864765 hasConcept C175665537 @default.
- W2021864765 hasConcept C192562407 @default.
- W2021864765 hasConcept C2775943645 @default.
- W2021864765 hasConcept C2779227376 @default.
- W2021864765 hasConcept C2780064504 @default.
- W2021864765 hasConcept C2781448156 @default.
- W2021864765 hasConcept C41008148 @default.
- W2021864765 hasConcept C49040817 @default.
- W2021864765 hasConcept C520434653 @default.
- W2021864765 hasConceptScore W2021864765C110738630 @default.
- W2021864765 hasConceptScore W2021864765C119857082 @default.
- W2021864765 hasConceptScore W2021864765C120665830 @default.
- W2021864765 hasConceptScore W2021864765C121332964 @default.
- W2021864765 hasConceptScore W2021864765C142259097 @default.
- W2021864765 hasConceptScore W2021864765C143025027 @default.
- W2021864765 hasConceptScore W2021864765C159985019 @default.
- W2021864765 hasConceptScore W2021864765C160671074 @default.
- W2021864765 hasConceptScore W2021864765C175665537 @default.
- W2021864765 hasConceptScore W2021864765C192562407 @default.
- W2021864765 hasConceptScore W2021864765C2775943645 @default.
- W2021864765 hasConceptScore W2021864765C2779227376 @default.
- W2021864765 hasConceptScore W2021864765C2780064504 @default.
- W2021864765 hasConceptScore W2021864765C2781448156 @default.
- W2021864765 hasConceptScore W2021864765C41008148 @default.
- W2021864765 hasConceptScore W2021864765C49040817 @default.
- W2021864765 hasConceptScore W2021864765C520434653 @default.
- W2021864765 hasIssue "7-8" @default.
- W2021864765 hasLocation W20218647651 @default.
- W2021864765 hasOpenAccess W2021864765 @default.
- W2021864765 hasPrimaryLocation W20218647651 @default.
- W2021864765 hasRelatedWork W1514809849 @default.
- W2021864765 hasRelatedWork W1659999816 @default.
- W2021864765 hasRelatedWork W1961809303 @default.
- W2021864765 hasRelatedWork W2005546722 @default.
- W2021864765 hasRelatedWork W2051211700 @default.
- W2021864765 hasRelatedWork W2319436211 @default.
- W2021864765 hasRelatedWork W2360255561 @default.
- W2021864765 hasRelatedWork W2362704316 @default.
- W2021864765 hasRelatedWork W2403761727 @default.
- W2021864765 hasRelatedWork W2118356701 @default.
- W2021864765 hasVolume "8" @default.
- W2021864765 isParatext "false" @default.
- W2021864765 isRetracted "false" @default.
- W2021864765 magId "2021864765" @default.
- W2021864765 workType "article" @default.