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- W2021892507 abstract "Both optical emission spectroscopy and infrared diode laser absorption spectroscopy were applied to measurements of rotational temperatures of CF radicals in 60 MHz capacitively coupled CF4 and CF4/Ar plasmas. The rotational temperature of CF radicals in the excited state was determined by fitting the optical emission spectra with the calculation results. The calculation for emission spectra was performed using two different rotational constant value of A=0.76 and 4.48 for the B2Δ state, and then the constant A was evaluated to be 0.76 from the emission intensities. In the CF4 plasma, the CF rotational temperature was increased from 300 to 380 K as the 60 MHz power was increased from 300 to 1500 W, and the radical density was increased from 1.59×1012 to 5.05×1012 cm-3. On the other hand, in the CF4/Ar plasma, the CF rotational temperature was increased by 20 K with the power, and the radical density was constant at 1.1×1012 cm-3. It was found that the rotational temperatures of CF radicals in the excited state were in equilibrium with those in the ground state under the present conditions." @default.
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- W2021892507 date "2007-03-08" @default.
- W2021892507 modified "2023-09-26" @default.
- W2021892507 title "Temperature and Density of CF Radicals in 60 MHz Capacitively Coupled Fluorocarbon Gas Plasma" @default.
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- W2021892507 doi "https://doi.org/10.1143/jjap.46.1176" @default.
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