Matches in SemOpenAlex for { <https://semopenalex.org/work/W2021898839> ?p ?o ?g. }
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- W2021898839 endingPage "240" @default.
- W2021898839 startingPage "235" @default.
- W2021898839 abstract "The interface diffusion, reaction, and adherence of rapid thermal annealed Ti/ALN were investigated by RBS, AES, SIMS, XRD and a scratch test. The experimental results show that diffusion and reaction occurs at the interface of Ti/AlN when the sample is rapidly annealed. During annealing, both the O adsorbed on the surface and doped in the AlN substrate diffuse into the Ti film. At low temperature TiO2 is produced. At higher temperature O reacts with the diffused Al in the Ti film and produces an Al2O3 layer in the middle of the film. N diffuses into the Ti film and produces TiN with an interface reaction. Ti oxide is produced at the interface between the film and the substrate. Scratch test results show that interface adherence is distinctly improved by rapid annealing at low temperature and decreases at higher temperature." @default.
- W2021898839 created "2016-06-24" @default.
- W2021898839 creator A5006034655 @default.
- W2021898839 creator A5031722083 @default.
- W2021898839 date "1999-07-01" @default.
- W2021898839 modified "2023-09-26" @default.
- W2021898839 title "Effect of rapid thermal annealing on Ti–AlN interfaces" @default.
- W2021898839 cites W1527706842 @default.
- W2021898839 cites W1972143177 @default.
- W2021898839 cites W2071152213 @default.
- W2021898839 cites W2079892311 @default.
- W2021898839 cites W2089978700 @default.
- W2021898839 cites W2608578032 @default.
- W2021898839 doi "https://doi.org/10.1016/s0169-4332(99)00075-6" @default.
- W2021898839 hasPublicationYear "1999" @default.
- W2021898839 type Work @default.
- W2021898839 sameAs 2021898839 @default.
- W2021898839 citedByCount "1" @default.
- W2021898839 countsByYear W20218988392020 @default.
- W2021898839 crossrefType "journal-article" @default.
- W2021898839 hasAuthorship W2021898839A5006034655 @default.
- W2021898839 hasAuthorship W2021898839A5031722083 @default.
- W2021898839 hasConcept C113196181 @default.
- W2021898839 hasConcept C127413603 @default.
- W2021898839 hasConcept C159985019 @default.
- W2021898839 hasConcept C185592680 @default.
- W2021898839 hasConcept C191897082 @default.
- W2021898839 hasConcept C192562407 @default.
- W2021898839 hasConcept C2777855556 @default.
- W2021898839 hasConcept C2778836790 @default.
- W2021898839 hasConcept C2779227376 @default.
- W2021898839 hasConcept C2779851234 @default.
- W2021898839 hasConcept C2781235140 @default.
- W2021898839 hasConcept C42360764 @default.
- W2021898839 hasConcept C43617362 @default.
- W2021898839 hasConcept C525849907 @default.
- W2021898839 hasConceptScore W2021898839C113196181 @default.
- W2021898839 hasConceptScore W2021898839C127413603 @default.
- W2021898839 hasConceptScore W2021898839C159985019 @default.
- W2021898839 hasConceptScore W2021898839C185592680 @default.
- W2021898839 hasConceptScore W2021898839C191897082 @default.
- W2021898839 hasConceptScore W2021898839C192562407 @default.
- W2021898839 hasConceptScore W2021898839C2777855556 @default.
- W2021898839 hasConceptScore W2021898839C2778836790 @default.
- W2021898839 hasConceptScore W2021898839C2779227376 @default.
- W2021898839 hasConceptScore W2021898839C2779851234 @default.
- W2021898839 hasConceptScore W2021898839C2781235140 @default.
- W2021898839 hasConceptScore W2021898839C42360764 @default.
- W2021898839 hasConceptScore W2021898839C43617362 @default.
- W2021898839 hasConceptScore W2021898839C525849907 @default.
- W2021898839 hasIssue "3-4" @default.
- W2021898839 hasLocation W20218988391 @default.
- W2021898839 hasOpenAccess W2021898839 @default.
- W2021898839 hasPrimaryLocation W20218988391 @default.
- W2021898839 hasRelatedWork W1040783656 @default.
- W2021898839 hasRelatedWork W1892096663 @default.
- W2021898839 hasRelatedWork W1985919694 @default.
- W2021898839 hasRelatedWork W2047631033 @default.
- W2021898839 hasRelatedWork W2074743978 @default.
- W2021898839 hasRelatedWork W2075610245 @default.
- W2021898839 hasRelatedWork W2087024410 @default.
- W2021898839 hasRelatedWork W2148331591 @default.
- W2021898839 hasRelatedWork W2343987817 @default.
- W2021898839 hasRelatedWork W2066257608 @default.
- W2021898839 hasVolume "148" @default.
- W2021898839 isParatext "false" @default.
- W2021898839 isRetracted "false" @default.
- W2021898839 magId "2021898839" @default.
- W2021898839 workType "article" @default.