Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022032131> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2022032131 endingPage "1365" @default.
- W2022032131 startingPage "1363" @default.
- W2022032131 abstract "Abstract Etching of monocrystalline diamond in oxygen and water vapor at 1100 °C through small pores in a silicon nitride film produced smooth-walled rectangular cavities. The cavities were imaged by electron microscopy and measured by interferometric microscopy. The observed cavities ranged in width from approximately 1 μm up to 72 μm, in each case exhibiting smooth, vertical sidewalls, a flat bottom, and a depth equal to half its width. Cavity boundaries were determined to lie along slow-etching {100} crystallographic planes, suggesting the possibility of a powerful class of techniques for high-aspect-ratio bulk micromachining of diamond." @default.
- W2022032131 created "2016-06-24" @default.
- W2022032131 creator A5059563495 @default.
- W2022032131 creator A5072093705 @default.
- W2022032131 creator A5076450477 @default.
- W2022032131 creator A5083222955 @default.
- W2022032131 date "2011-11-01" @default.
- W2022032131 modified "2023-10-16" @default.
- W2022032131 title "Rectangular scale-similar etch pits in monocrystalline diamond" @default.
- W2022032131 cites W1485387152 @default.
- W2022032131 cites W1670172520 @default.
- W2022032131 cites W1975496732 @default.
- W2022032131 cites W1986974985 @default.
- W2022032131 cites W1992795243 @default.
- W2022032131 cites W2013507070 @default.
- W2022032131 cites W2013740807 @default.
- W2022032131 cites W2022909559 @default.
- W2022032131 cites W2026764686 @default.
- W2022032131 cites W2041386918 @default.
- W2022032131 cites W2053531610 @default.
- W2022032131 cites W2071855404 @default.
- W2022032131 cites W2076714844 @default.
- W2022032131 cites W2076804708 @default.
- W2022032131 cites W2083847060 @default.
- W2022032131 doi "https://doi.org/10.1016/j.diamond.2011.08.007" @default.
- W2022032131 hasPublicationYear "2011" @default.
- W2022032131 type Work @default.
- W2022032131 sameAs 2022032131 @default.
- W2022032131 citedByCount "1" @default.
- W2022032131 countsByYear W20220321312019 @default.
- W2022032131 crossrefType "journal-article" @default.
- W2022032131 hasAuthorship W2022032131A5059563495 @default.
- W2022032131 hasAuthorship W2022032131A5072093705 @default.
- W2022032131 hasAuthorship W2022032131A5076450477 @default.
- W2022032131 hasAuthorship W2022032131A5083222955 @default.
- W2022032131 hasConcept C121332964 @default.
- W2022032131 hasConcept C159985019 @default.
- W2022032131 hasConcept C171250308 @default.
- W2022032131 hasConcept C192562407 @default.
- W2022032131 hasConcept C26953177 @default.
- W2022032131 hasConcept C2776921476 @default.
- W2022032131 hasConcept C2778755073 @default.
- W2022032131 hasConcept C49040817 @default.
- W2022032131 hasConcept C544956773 @default.
- W2022032131 hasConcept C61696701 @default.
- W2022032131 hasConcept C62520636 @default.
- W2022032131 hasConceptScore W2022032131C121332964 @default.
- W2022032131 hasConceptScore W2022032131C159985019 @default.
- W2022032131 hasConceptScore W2022032131C171250308 @default.
- W2022032131 hasConceptScore W2022032131C192562407 @default.
- W2022032131 hasConceptScore W2022032131C26953177 @default.
- W2022032131 hasConceptScore W2022032131C2776921476 @default.
- W2022032131 hasConceptScore W2022032131C2778755073 @default.
- W2022032131 hasConceptScore W2022032131C49040817 @default.
- W2022032131 hasConceptScore W2022032131C544956773 @default.
- W2022032131 hasConceptScore W2022032131C61696701 @default.
- W2022032131 hasConceptScore W2022032131C62520636 @default.
- W2022032131 hasIssue "10" @default.
- W2022032131 hasLocation W20220321311 @default.
- W2022032131 hasOpenAccess W2022032131 @default.
- W2022032131 hasPrimaryLocation W20220321311 @default.
- W2022032131 hasRelatedWork W1969470228 @default.
- W2022032131 hasRelatedWork W2064822386 @default.
- W2022032131 hasRelatedWork W2090303889 @default.
- W2022032131 hasRelatedWork W2159604236 @default.
- W2022032131 hasRelatedWork W2365002516 @default.
- W2022032131 hasRelatedWork W2370711799 @default.
- W2022032131 hasRelatedWork W2390310222 @default.
- W2022032131 hasRelatedWork W2786780290 @default.
- W2022032131 hasRelatedWork W4233292031 @default.
- W2022032131 hasRelatedWork W4320911138 @default.
- W2022032131 hasVolume "20" @default.
- W2022032131 isParatext "false" @default.
- W2022032131 isRetracted "false" @default.
- W2022032131 magId "2022032131" @default.
- W2022032131 workType "article" @default.