Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022060439> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2022060439 abstract "The Ion Projection Lithography is one challenge for a semiconductor technology, starting with sub micron structures, which are beyond the facilities of conventional UV lithography. Within this field of research one of the most critical aspects is the development of stencil mask, because the stress formation during the various process steps affects the critical dimensions of the structures to be written. In this paper different methods for the determination of residual stress and elastic constants of thin membranes of doped silicon are reviewed and additionally, a novel technique is presented. First experimental result show, that they are quite different from the values of the bulk material." @default.
- W2022060439 created "2016-06-24" @default.
- W2022060439 creator A5004719658 @default.
- W2022060439 creator A5010402481 @default.
- W2022060439 creator A5010616723 @default.
- W2022060439 creator A5015276990 @default.
- W2022060439 creator A5052703056 @default.
- W2022060439 creator A5055362628 @default.
- W2022060439 creator A5057705318 @default.
- W2022060439 creator A5083189081 @default.
- W2022060439 date "1999-04-23" @default.
- W2022060439 modified "2023-09-27" @default.
- W2022060439 title "Determination of residual stress and elastic constants of silicon open stencil masks for ion projection lithography" @default.
- W2022060439 doi "https://doi.org/10.1117/12.346213" @default.
- W2022060439 hasPublicationYear "1999" @default.
- W2022060439 type Work @default.
- W2022060439 sameAs 2022060439 @default.
- W2022060439 citedByCount "2" @default.
- W2022060439 crossrefType "proceedings-article" @default.
- W2022060439 hasAuthorship W2022060439A5004719658 @default.
- W2022060439 hasAuthorship W2022060439A5010402481 @default.
- W2022060439 hasAuthorship W2022060439A5010616723 @default.
- W2022060439 hasAuthorship W2022060439A5015276990 @default.
- W2022060439 hasAuthorship W2022060439A5052703056 @default.
- W2022060439 hasAuthorship W2022060439A5055362628 @default.
- W2022060439 hasAuthorship W2022060439A5057705318 @default.
- W2022060439 hasAuthorship W2022060439A5083189081 @default.
- W2022060439 hasConcept C108225325 @default.
- W2022060439 hasConcept C11413529 @default.
- W2022060439 hasConcept C120665830 @default.
- W2022060439 hasConcept C121332964 @default.
- W2022060439 hasConcept C136525101 @default.
- W2022060439 hasConcept C138885662 @default.
- W2022060439 hasConcept C142724271 @default.
- W2022060439 hasConcept C159985019 @default.
- W2022060439 hasConcept C162117346 @default.
- W2022060439 hasConcept C171250308 @default.
- W2022060439 hasConcept C192562407 @default.
- W2022060439 hasConcept C204223013 @default.
- W2022060439 hasConcept C204787440 @default.
- W2022060439 hasConcept C21036866 @default.
- W2022060439 hasConcept C2779227376 @default.
- W2022060439 hasConcept C2781048479 @default.
- W2022060439 hasConcept C37292000 @default.
- W2022060439 hasConcept C41008148 @default.
- W2022060439 hasConcept C41794268 @default.
- W2022060439 hasConcept C41895202 @default.
- W2022060439 hasConcept C459310 @default.
- W2022060439 hasConcept C49040817 @default.
- W2022060439 hasConcept C53524968 @default.
- W2022060439 hasConcept C544956773 @default.
- W2022060439 hasConcept C57493831 @default.
- W2022060439 hasConcept C70520399 @default.
- W2022060439 hasConcept C71924100 @default.
- W2022060439 hasConcept C76752949 @default.
- W2022060439 hasConceptScore W2022060439C108225325 @default.
- W2022060439 hasConceptScore W2022060439C11413529 @default.
- W2022060439 hasConceptScore W2022060439C120665830 @default.
- W2022060439 hasConceptScore W2022060439C121332964 @default.
- W2022060439 hasConceptScore W2022060439C136525101 @default.
- W2022060439 hasConceptScore W2022060439C138885662 @default.
- W2022060439 hasConceptScore W2022060439C142724271 @default.
- W2022060439 hasConceptScore W2022060439C159985019 @default.
- W2022060439 hasConceptScore W2022060439C162117346 @default.
- W2022060439 hasConceptScore W2022060439C171250308 @default.
- W2022060439 hasConceptScore W2022060439C192562407 @default.
- W2022060439 hasConceptScore W2022060439C204223013 @default.
- W2022060439 hasConceptScore W2022060439C204787440 @default.
- W2022060439 hasConceptScore W2022060439C21036866 @default.
- W2022060439 hasConceptScore W2022060439C2779227376 @default.
- W2022060439 hasConceptScore W2022060439C2781048479 @default.
- W2022060439 hasConceptScore W2022060439C37292000 @default.
- W2022060439 hasConceptScore W2022060439C41008148 @default.
- W2022060439 hasConceptScore W2022060439C41794268 @default.
- W2022060439 hasConceptScore W2022060439C41895202 @default.
- W2022060439 hasConceptScore W2022060439C459310 @default.
- W2022060439 hasConceptScore W2022060439C49040817 @default.
- W2022060439 hasConceptScore W2022060439C53524968 @default.
- W2022060439 hasConceptScore W2022060439C544956773 @default.
- W2022060439 hasConceptScore W2022060439C57493831 @default.
- W2022060439 hasConceptScore W2022060439C70520399 @default.
- W2022060439 hasConceptScore W2022060439C71924100 @default.
- W2022060439 hasConceptScore W2022060439C76752949 @default.
- W2022060439 hasLocation W20220604391 @default.
- W2022060439 hasOpenAccess W2022060439 @default.
- W2022060439 hasPrimaryLocation W20220604391 @default.
- W2022060439 hasRelatedWork W1963931461 @default.
- W2022060439 hasRelatedWork W1978277210 @default.
- W2022060439 hasRelatedWork W2016414238 @default.
- W2022060439 hasRelatedWork W2021957003 @default.
- W2022060439 hasRelatedWork W2036697329 @default.
- W2022060439 hasRelatedWork W2039969115 @default.
- W2022060439 hasRelatedWork W2055070438 @default.
- W2022060439 hasRelatedWork W2890402440 @default.
- W2022060439 hasRelatedWork W1232801788 @default.
- W2022060439 hasRelatedWork W2741571483 @default.
- W2022060439 isParatext "false" @default.
- W2022060439 isRetracted "false" @default.
- W2022060439 magId "2022060439" @default.
- W2022060439 workType "article" @default.