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- W2022061467 abstract "Abstract A method is proposed for determining the functional relationship between the carrier mobility and the electrostatic potential in uniform n- or p-type thin film semiconductors from experimental Hall measurements. Use of a symmetrical Hall effect MISIM thin film measuring structure yields tractable solutions of Poisson's equation and should help circumvent problems of interpretation that might otherwise arise when using an asymmetric MIS configuration. In the analytic method demonstrated for an n-type semiconductor with field-plate-induced accumulation layers, two expressions are obtained relating donor density Nd and carrier drift mobility μ(∅) in terms of measurable Hall effect parameters as a function of normalized electrostatic potential o and normalized film thickness 2λd. A given example using a plausible functional relationship for μ(o) indicates that considerable deviations between μ(o) and the Hall mobility can exist. A numerical procedure for solving the integral equations relating μ(o) and is presented." @default.
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- W2022061467 date "1977-07-01" @default.
- W2022061467 modified "2023-09-27" @default.
- W2022061467 title "The measurement of mobilities and doping concentrations in field-effect-controlled thin semiconductor films" @default.
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- W2022061467 doi "https://doi.org/10.1016/0040-6090(77)90031-1" @default.
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