FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022061958> ?p ?o ?g. }

• W2022061958 endingPage "378" @default.
• W2022061958 startingPage "369" @default.
• W2022061958 abstract "An interpretation of the thermal drift of the bulk silicon MEMS capacitive accelerometer using multiphysics analysis is proposed in this paper. Stress, strain, electrostatics, thermal and structural interactions are simulated based on the finite element method. The thermal drift is generated by both the stiffness asymmetry of the U-springs of the structure and relative displacement caused by the mismatch in thermal expansion coefficients between the Pyrex glass substrate and heavily boron-doped silicon structure, neither of which is dispensable. Although the layout design is symmetrical, the asymmetric widths of the U-springs, which cause stiffness asymmetry, are observed by scanning electron microscopy. To achieve a fast and feasible simulation, we divide the model into two components with different configurations. During the simulation, boundary conditions are carefully set up according to the fabrication process. A series of experiments is designed to verify the result, including a temperature experiment from −40 to 100 °C and DC voltage polarity experiment. To verify the conclusion, a new layout design that gradually increases the width of the U-springs without changing any other dimension is simulated, fabricated, and tested. The simulation and experiment results are compared and discussed." @default.
• W2022061958 created "2016-06-24" @default.
• W2022061958 creator A5009884211 @default.
• W2022061958 creator A5029721738 @default.
• W2022061958 creator A5046167884 @default.
• W2022061958 creator A5050218335 @default.
• W2022061958 creator A5061418473 @default.
• W2022061958 creator A5076530999 @default.
• W2022061958 date "2011-12-01" @default.
• W2022061958 modified "2023-10-06" @default.
• W2022061958 title "Thermal drift analysis using a multiphysics model of bulk silicon MEMS capacitive accelerometer" @default.
• W2022061958 cites W2000874318 @default.
• W2022061958 cites W2012060173 @default.
• W2022061958 cites W2018399560 @default.
• W2022061958 cites W2086620292 @default.
• W2022061958 cites W2118019219 @default.
• W2022061958 cites W2134732074 @default.
• W2022061958 cites W4235666583 @default.
• W2022061958 doi "https://doi.org/10.1016/j.sna.2011.09.016" @default.
• W2022061958 hasPublicationYear "2011" @default.
• W2022061958 type Work @default.
• W2022061958 sameAs 2022061958 @default.
• W2022061958 citedByCount "64" @default.
• W2022061958 countsByYear W20220619582013 @default.
• W2022061958 countsByYear W20220619582014 @default.
• W2022061958 countsByYear W20220619582015 @default.
• W2022061958 countsByYear W20220619582016 @default.
• W2022061958 countsByYear W20220619582017 @default.
• W2022061958 countsByYear W20220619582018 @default.
• W2022061958 countsByYear W20220619582019 @default.
• W2022061958 countsByYear W20220619582020 @default.
• W2022061958 countsByYear W20220619582021 @default.
• W2022061958 countsByYear W20220619582022 @default.
• W2022061958 countsByYear W20220619582023 @default.
• W2022061958 crossrefType "journal-article" @default.
• W2022061958 hasAuthorship W2022061958A5009884211 @default.
• W2022061958 hasAuthorship W2022061958A5029721738 @default.
• W2022061958 hasAuthorship W2022061958A5046167884 @default.
• W2022061958 hasAuthorship W2022061958A5050218335 @default.
• W2022061958 hasAuthorship W2022061958A5061418473 @default.
• W2022061958 hasAuthorship W2022061958A5076530999 @default.
• W2022061958 hasConcept C107551265 @default.
• W2022061958 hasConcept C119599485 @default.
• W2022061958 hasConcept C121332964 @default.
• W2022061958 hasConcept C127413603 @default.
• W2022061958 hasConcept C135628077 @default.
• W2022061958 hasConcept C136525101 @default.
• W2022061958 hasConcept C142724271 @default.
• W2022061958 hasConcept C153294291 @default.
• W2022061958 hasConcept C15744967 @default.
• W2022061958 hasConcept C159985019 @default.
• W2022061958 hasConcept C165801399 @default.
• W2022061958 hasConcept C17525397 @default.
• W2022061958 hasConcept C182310444 @default.
• W2022061958 hasConcept C192562407 @default.
• W2022061958 hasConcept C204530211 @default.
• W2022061958 hasConcept C204787440 @default.
• W2022061958 hasConcept C206755178 @default.
• W2022061958 hasConcept C2779372316 @default.
• W2022061958 hasConcept C30066665 @default.
• W2022061958 hasConcept C37977207 @default.
• W2022061958 hasConcept C46435376 @default.
• W2022061958 hasConcept C47463417 @default.
• W2022061958 hasConcept C49040817 @default.
• W2022061958 hasConcept C542102704 @default.
• W2022061958 hasConcept C544956773 @default.
• W2022061958 hasConcept C57879066 @default.
• W2022061958 hasConcept C62520636 @default.
• W2022061958 hasConcept C66938386 @default.
• W2022061958 hasConcept C71924100 @default.
• W2022061958 hasConcept C78519656 @default.
• W2022061958 hasConceptScore W2022061958C107551265 @default.
• W2022061958 hasConceptScore W2022061958C119599485 @default.
• W2022061958 hasConceptScore W2022061958C121332964 @default.
• W2022061958 hasConceptScore W2022061958C127413603 @default.
• W2022061958 hasConceptScore W2022061958C135628077 @default.
• W2022061958 hasConceptScore W2022061958C136525101 @default.
• W2022061958 hasConceptScore W2022061958C142724271 @default.
• W2022061958 hasConceptScore W2022061958C153294291 @default.
• W2022061958 hasConceptScore W2022061958C15744967 @default.
• W2022061958 hasConceptScore W2022061958C159985019 @default.
• W2022061958 hasConceptScore W2022061958C165801399 @default.
• W2022061958 hasConceptScore W2022061958C17525397 @default.
• W2022061958 hasConceptScore W2022061958C182310444 @default.
• W2022061958 hasConceptScore W2022061958C192562407 @default.
• W2022061958 hasConceptScore W2022061958C204530211 @default.
• W2022061958 hasConceptScore W2022061958C204787440 @default.
• W2022061958 hasConceptScore W2022061958C206755178 @default.
• W2022061958 hasConceptScore W2022061958C2779372316 @default.
• W2022061958 hasConceptScore W2022061958C30066665 @default.
• W2022061958 hasConceptScore W2022061958C37977207 @default.
• W2022061958 hasConceptScore W2022061958C46435376 @default.
• W2022061958 hasConceptScore W2022061958C47463417 @default.
• W2022061958 hasConceptScore W2022061958C49040817 @default.
• W2022061958 hasConceptScore W2022061958C542102704 @default.
• W2022061958 hasConceptScore W2022061958C544956773 @default.
• W2022061958 hasConceptScore W2022061958C57879066 @default.
• W2022061958 hasConceptScore W2022061958C62520636 @default.

• next