Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022070172> ?p ?o ?g. }
- W2022070172 endingPage "417" @default.
- W2022070172 startingPage "390" @default.
- W2022070172 abstract "In this report we present a novel strategy in selective epitaxial growth on top of Si pillars, which results in a tessellated Ge film, composed by self-aligned micron-sized crystals in a maskless process. Modelling by rate equations the morphology evolution of fully facetted crystal profiles is extensively outlined, showing an excellent prediction of the peculiar role played by flux shielding among microcrystals, in the case of dense array configuration. Crack formation and substrate bending, caused by the mismatch in thermal expansion coefficients, are eliminated by the mechanical decoupling among individual microcrystals, which are also shown to be dislocation- and strain-free. The method has been also tested for Si1−xGex alloys, with compositions ranging from pure silicon to pure germanium. There are ample reasons to believe that this approach could be extended to other material combinations and substrate orientations, actually providing a technology platform for several device applications." @default.
- W2022070172 created "2016-06-24" @default.
- W2022070172 creator A5004283326 @default.
- W2022070172 creator A5008347554 @default.
- W2022070172 creator A5011537615 @default.
- W2022070172 creator A5017248371 @default.
- W2022070172 creator A5024601555 @default.
- W2022070172 creator A5041178434 @default.
- W2022070172 creator A5073802763 @default.
- W2022070172 creator A5081647479 @default.
- W2022070172 date "2013-11-01" @default.
- W2022070172 modified "2023-10-16" @default.
- W2022070172 title "Self-aligned Ge and SiGe three-dimensional epitaxy on dense Si pillar arrays" @default.
- W2022070172 cites W1963749213 @default.
- W2022070172 cites W1966649151 @default.
- W2022070172 cites W1972611757 @default.
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- W2022070172 cites W2011783599 @default.
- W2022070172 cites W2012390591 @default.
- W2022070172 cites W2015148570 @default.
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- W2022070172 cites W2017334281 @default.
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- W2022070172 cites W2053636281 @default.
- W2022070172 cites W2054299669 @default.
- W2022070172 cites W2054404960 @default.
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- W2022070172 cites W2060409136 @default.
- W2022070172 cites W2061933686 @default.
- W2022070172 cites W2061973163 @default.
- W2022070172 cites W2064446791 @default.
- W2022070172 cites W2068260321 @default.
- W2022070172 cites W2075990045 @default.
- W2022070172 cites W2077195008 @default.
- W2022070172 cites W2077973938 @default.
- W2022070172 cites W2078488034 @default.
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- W2022070172 cites W2092474521 @default.
- W2022070172 cites W2093986957 @default.
- W2022070172 cites W2095344696 @default.
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- W2022070172 cites W2144349558 @default.
- W2022070172 cites W2147191860 @default.
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- W2022070172 cites W2159597861 @default.
- W2022070172 cites W2166479559 @default.
- W2022070172 cites W2258672195 @default.
- W2022070172 cites W4240139632 @default.
- W2022070172 doi "https://doi.org/10.1016/j.surfrep.2013.10.002" @default.
- W2022070172 hasPublicationYear "2013" @default.
- W2022070172 type Work @default.
- W2022070172 sameAs 2022070172 @default.
- W2022070172 citedByCount "39" @default.
- W2022070172 countsByYear W20220701722014 @default.
- W2022070172 countsByYear W20220701722015 @default.