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• W2022085514 endingPage "2040" @default.
• W2022085514 startingPage "2034" @default.
• W2022085514 abstract "Surfactant templated mesoporous silica thin films were prepared as the intermetal dielectric for ultralarge scaled integrated circuit application, and the thermal and chemical stability of the Cu∕nitridedTa∕mesoporous silica film stack on the Si wafer was studied. Trimethylsilylation of the mesoporous silica thin film by hexamethyldisilazane vapor treatment significantly improves hydrophobicity of the mesoporous dielectric, and a dielectric constant (k) smaller than 2 can be obtained for the thin film. According to Fourier transform infrared spectroscopy and thermal desorption spectroscopy, decomposition of trimethylsilyl groups on the pore surface becomes significant at temperatures larger than 400 °C. However, when the metallized film stack was annealed at temperatures higher than 400 °C, the film stack shows little delamination between layers and still retains smooth interfaces according to Auger electron spectroscopy and transmission electron microscopy analyses. Ta2C nanoparticles were found to exist at the Ta(N)∕mesoporous silica interface of the film stack annealed at 600 °C. Bias-temperature stress test of the metallized film stack shows little Cu diffusion into the mesoporous dielectric layer." @default.
• W2022085514 created "2016-06-24" @default.
• W2022085514 creator A5024113651 @default.
• W2022085514 creator A5027785736 @default.
• W2022085514 creator A5045161903 @default.
• W2022085514 creator A5066120853 @default.
• W2022085514 creator A5078702629 @default.
• W2022085514 date "2005-09-01" @default.
• W2022085514 modified "2023-10-18" @default.
• W2022085514 title "Thermal stability of trimethylsilylated mesoporous silica thin films as the ultralow-k dielectric for copper interconnects" @default.
• W2022085514 cites W1575064249 @default.
• W2022085514 cites W1972393317 @default.
• W2022085514 cites W1972845598 @default.
• W2022085514 cites W1975039686 @default.
• W2022085514 cites W1977616853 @default.
• W2022085514 cites W1980502427 @default.
• W2022085514 cites W1992095805 @default.
• W2022085514 cites W1998984427 @default.
• W2022085514 cites W2002212479 @default.
• W2022085514 cites W2009635310 @default.
• W2022085514 cites W2035638042 @default.
• W2022085514 cites W2041746591 @default.
• W2022085514 cites W2055104950 @default.
• W2022085514 cites W2055465801 @default.
• W2022085514 cites W2057424738 @default.
• W2022085514 cites W2078204252 @default.
• W2022085514 cites W2126415115 @default.
• W2022085514 cites W2944728552 @default.
• W2022085514 doi "https://doi.org/10.1116/1.2050656" @default.
• W2022085514 hasPublicationYear "2005" @default.
• W2022085514 type Work @default.
• W2022085514 sameAs 2022085514 @default.
• W2022085514 citedByCount "14" @default.
• W2022085514 countsByYear W20220855142013 @default.
• W2022085514 countsByYear W20220855142016 @default.
• W2022085514 countsByYear W20220855142021 @default.
• W2022085514 countsByYear W20220855142022 @default.
• W2022085514 countsByYear W20220855142023 @default.
• W2022085514 crossrefType "journal-article" @default.
• W2022085514 hasAuthorship W2022085514A5024113651 @default.
• W2022085514 hasAuthorship W2022085514A5027785736 @default.
• W2022085514 hasAuthorship W2022085514A5045161903 @default.
• W2022085514 hasAuthorship W2022085514A5066120853 @default.
• W2022085514 hasAuthorship W2022085514A5078702629 @default.
• W2022085514 hasConcept C113196181 @default.
• W2022085514 hasConcept C121332964 @default.
• W2022085514 hasConcept C127413603 @default.
• W2022085514 hasConcept C133386390 @default.
• W2022085514 hasConcept C159985019 @default.
• W2022085514 hasConcept C161790260 @default.
• W2022085514 hasConcept C171250308 @default.
• W2022085514 hasConcept C178790620 @default.
• W2022085514 hasConcept C185544564 @default.
• W2022085514 hasConcept C185592680 @default.
• W2022085514 hasConcept C19067145 @default.
• W2022085514 hasConcept C192562407 @default.
• W2022085514 hasConcept C25442681 @default.
• W2022085514 hasConcept C2777496208 @default.
• W2022085514 hasConcept C42360764 @default.
• W2022085514 hasConcept C49040817 @default.
• W2022085514 hasConcept C57410435 @default.
• W2022085514 hasConcept C59061564 @default.
• W2022085514 hasConcept C5913796 @default.
• W2022085514 hasConcept C82776694 @default.
• W2022085514 hasConceptScore W2022085514C113196181 @default.
• W2022085514 hasConceptScore W2022085514C121332964 @default.
• W2022085514 hasConceptScore W2022085514C127413603 @default.
• W2022085514 hasConceptScore W2022085514C133386390 @default.
• W2022085514 hasConceptScore W2022085514C159985019 @default.
• W2022085514 hasConceptScore W2022085514C161790260 @default.
• W2022085514 hasConceptScore W2022085514C171250308 @default.
• W2022085514 hasConceptScore W2022085514C178790620 @default.
• W2022085514 hasConceptScore W2022085514C185544564 @default.
• W2022085514 hasConceptScore W2022085514C185592680 @default.
• W2022085514 hasConceptScore W2022085514C19067145 @default.
• W2022085514 hasConceptScore W2022085514C192562407 @default.
• W2022085514 hasConceptScore W2022085514C25442681 @default.
• W2022085514 hasConceptScore W2022085514C2777496208 @default.
• W2022085514 hasConceptScore W2022085514C42360764 @default.
• W2022085514 hasConceptScore W2022085514C49040817 @default.
• W2022085514 hasConceptScore W2022085514C57410435 @default.
• W2022085514 hasConceptScore W2022085514C59061564 @default.
• W2022085514 hasConceptScore W2022085514C5913796 @default.
• W2022085514 hasConceptScore W2022085514C82776694 @default.
• W2022085514 hasIssue "5" @default.
• W2022085514 hasLocation W20220855141 @default.
• W2022085514 hasOpenAccess W2022085514 @default.
• W2022085514 hasPrimaryLocation W20220855141 @default.
• W2022085514 hasRelatedWork W1227135935 @default.
• W2022085514 hasRelatedWork W1582317195 @default.
• W2022085514 hasRelatedWork W1979974383 @default.
• W2022085514 hasRelatedWork W2018726308 @default.
• W2022085514 hasRelatedWork W2019178707 @default.
• W2022085514 hasRelatedWork W2081784674 @default.
• W2022085514 hasRelatedWork W2351287761 @default.
• W2022085514 hasRelatedWork W4280534560 @default.
• W2022085514 hasRelatedWork W646923241 @default.
• W2022085514 hasRelatedWork W79101287 @default.

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