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- W202208618 abstract "The purpose of this chapter is to lead a non-specialist through the complexity of the fundamental physical processes which occur in the production of positive and negative ion beams. Since many ion sources are gas, or vapour based sources, some introduction to conduction in gases and the behaviour of a gaseous plasma is given. The principles of extracting ion beams from such plasmas are explained followed by brief descriptions of some of the more commonly used ion sources in the semiconductor industry." @default.
- W202208618 created "2016-06-24" @default.
- W202208618 creator A5070612625 @default.
- W202208618 date "1988-01-01" @default.
- W202208618 modified "2023-09-27" @default.
- W202208618 title "An INTRODUCTION TO ION SOURCES" @default.
- W202208618 cites W1970425525 @default.
- W202208618 cites W1987028876 @default.
- W202208618 cites W1994288772 @default.
- W202208618 cites W2002223735 @default.
- W202208618 cites W2034831498 @default.
- W202208618 cites W2048510146 @default.
- W202208618 cites W2059858168 @default.
- W202208618 cites W2067204516 @default.
- W202208618 doi "https://doi.org/10.1016/b978-0-12-780621-1.50009-5" @default.
- W202208618 hasPublicationYear "1988" @default.
- W202208618 type Work @default.
- W202208618 sameAs 202208618 @default.
- W202208618 citedByCount "1" @default.
- W202208618 crossrefType "book-chapter" @default.
- W202208618 hasAuthorship W202208618A5070612625 @default.
- W202208618 hasConcept C108225325 @default.
- W202208618 hasConcept C121332964 @default.
- W202208618 hasConcept C145148216 @default.
- W202208618 hasConcept C159985019 @default.
- W202208618 hasConcept C172100665 @default.
- W202208618 hasConcept C184779094 @default.
- W202208618 hasConcept C185544564 @default.
- W202208618 hasConcept C192562407 @default.
- W202208618 hasConcept C49040817 @default.
- W202208618 hasConcept C61696701 @default.
- W202208618 hasConcept C62520636 @default.
- W202208618 hasConcept C82706917 @default.
- W202208618 hasConceptScore W202208618C108225325 @default.
- W202208618 hasConceptScore W202208618C121332964 @default.
- W202208618 hasConceptScore W202208618C145148216 @default.
- W202208618 hasConceptScore W202208618C159985019 @default.
- W202208618 hasConceptScore W202208618C172100665 @default.
- W202208618 hasConceptScore W202208618C184779094 @default.
- W202208618 hasConceptScore W202208618C185544564 @default.
- W202208618 hasConceptScore W202208618C192562407 @default.
- W202208618 hasConceptScore W202208618C49040817 @default.
- W202208618 hasConceptScore W202208618C61696701 @default.
- W202208618 hasConceptScore W202208618C62520636 @default.
- W202208618 hasConceptScore W202208618C82706917 @default.
- W202208618 hasLocation W2022086181 @default.
- W202208618 hasOpenAccess W202208618 @default.
- W202208618 hasPrimaryLocation W2022086181 @default.
- W202208618 hasRelatedWork W2037894293 @default.
- W202208618 hasRelatedWork W2397238036 @default.
- W202208618 hasRelatedWork W3023950705 @default.
- W202208618 hasRelatedWork W3042623960 @default.
- W202208618 hasRelatedWork W3123837688 @default.
- W202208618 isParatext "false" @default.
- W202208618 isRetracted "false" @default.
- W202208618 magId "202208618" @default.
- W202208618 workType "book-chapter" @default.