Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022095736> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2022095736 endingPage "2294" @default.
- W2022095736 startingPage "2286" @default.
- W2022095736 abstract "Sealed vacuum cavities are highly useful in silicon-based microelectromechanical systems. Sealed polysilicon cavities serve as reference chambers for commercially available pressure sensors and provide enclosures for high-Q mechanical resonators. They also provide isolation of resonant strain gauges from ambient gases and liquids for use in precision pressure transmitters. The residual pressure in such cavities is less than 10−5 Torr, as evidenced by the polysilicon resonator Q values which can be as high as 300 000. Measured values of Q can be dominated by parasitic electrical resistance losses in the electrical drive circuit. After these losses are accounted for, the dominant loss is due to mechanical radiation of acoustic waves from the supports to the rest of the die and package. The vibration of the beams can be excited and sensed in several different ways for testing purposes. Fiberoptically driven and sensed microbeams operating at up to 510 °C for several hours resulted in no loss of vacuum as evidenced by the restoration of resonator Q upon its return to room temperature. Thus optically resonant microbeams are potentially suitable for fiberoptic-based sensors that withstand harsh environments, including high temperature." @default.
- W2022095736 created "2016-06-24" @default.
- W2022095736 creator A5037112507 @default.
- W2022095736 creator A5042622710 @default.
- W2022095736 creator A5044442591 @default.
- W2022095736 creator A5064179816 @default.
- W2022095736 date "1999-07-01" @default.
- W2022095736 modified "2023-10-11" @default.
- W2022095736 title "Polysilicon sealed vacuum cavities for microelectromechanical systems" @default.
- W2022095736 cites W1964454488 @default.
- W2022095736 cites W1973840112 @default.
- W2022095736 cites W1977430069 @default.
- W2022095736 cites W1994179265 @default.
- W2022095736 cites W1995122641 @default.
- W2022095736 cites W1998881781 @default.
- W2022095736 cites W2005877932 @default.
- W2022095736 cites W2012976418 @default.
- W2022095736 cites W2042429635 @default.
- W2022095736 cites W2066447564 @default.
- W2022095736 cites W2116824280 @default.
- W2022095736 cites W2143144862 @default.
- W2022095736 cites W2147732975 @default.
- W2022095736 cites W4254463204 @default.
- W2022095736 doi "https://doi.org/10.1116/1.581762" @default.
- W2022095736 hasPublicationYear "1999" @default.
- W2022095736 type Work @default.
- W2022095736 sameAs 2022095736 @default.
- W2022095736 citedByCount "12" @default.
- W2022095736 countsByYear W20220957362012 @default.
- W2022095736 countsByYear W20220957362013 @default.
- W2022095736 countsByYear W20220957362015 @default.
- W2022095736 countsByYear W20220957362020 @default.
- W2022095736 crossrefType "journal-article" @default.
- W2022095736 hasAuthorship W2022095736A5037112507 @default.
- W2022095736 hasAuthorship W2022095736A5042622710 @default.
- W2022095736 hasAuthorship W2022095736A5044442591 @default.
- W2022095736 hasAuthorship W2022095736A5064179816 @default.
- W2022095736 hasConcept C119599485 @default.
- W2022095736 hasConcept C121332964 @default.
- W2022095736 hasConcept C127413603 @default.
- W2022095736 hasConcept C159985019 @default.
- W2022095736 hasConcept C171250308 @default.
- W2022095736 hasConcept C192562407 @default.
- W2022095736 hasConcept C198394728 @default.
- W2022095736 hasConcept C24890656 @default.
- W2022095736 hasConcept C30646810 @default.
- W2022095736 hasConcept C37977207 @default.
- W2022095736 hasConcept C49040817 @default.
- W2022095736 hasConcept C544956773 @default.
- W2022095736 hasConcept C60584519 @default.
- W2022095736 hasConcept C82225425 @default.
- W2022095736 hasConcept C97126364 @default.
- W2022095736 hasConcept C97355855 @default.
- W2022095736 hasConceptScore W2022095736C119599485 @default.
- W2022095736 hasConceptScore W2022095736C121332964 @default.
- W2022095736 hasConceptScore W2022095736C127413603 @default.
- W2022095736 hasConceptScore W2022095736C159985019 @default.
- W2022095736 hasConceptScore W2022095736C171250308 @default.
- W2022095736 hasConceptScore W2022095736C192562407 @default.
- W2022095736 hasConceptScore W2022095736C198394728 @default.
- W2022095736 hasConceptScore W2022095736C24890656 @default.
- W2022095736 hasConceptScore W2022095736C30646810 @default.
- W2022095736 hasConceptScore W2022095736C37977207 @default.
- W2022095736 hasConceptScore W2022095736C49040817 @default.
- W2022095736 hasConceptScore W2022095736C544956773 @default.
- W2022095736 hasConceptScore W2022095736C60584519 @default.
- W2022095736 hasConceptScore W2022095736C82225425 @default.
- W2022095736 hasConceptScore W2022095736C97126364 @default.
- W2022095736 hasConceptScore W2022095736C97355855 @default.
- W2022095736 hasIssue "4" @default.
- W2022095736 hasLocation W20220957361 @default.
- W2022095736 hasOpenAccess W2022095736 @default.
- W2022095736 hasPrimaryLocation W20220957361 @default.
- W2022095736 hasRelatedWork W1597768242 @default.
- W2022095736 hasRelatedWork W2022095736 @default.
- W2022095736 hasRelatedWork W2056837311 @default.
- W2022095736 hasRelatedWork W2094249125 @default.
- W2022095736 hasRelatedWork W2150017286 @default.
- W2022095736 hasRelatedWork W2576780000 @default.
- W2022095736 hasRelatedWork W2587892165 @default.
- W2022095736 hasRelatedWork W2899084033 @default.
- W2022095736 hasRelatedWork W4241730390 @default.
- W2022095736 hasRelatedWork W2169325164 @default.
- W2022095736 hasVolume "17" @default.
- W2022095736 isParatext "false" @default.
- W2022095736 isRetracted "false" @default.
- W2022095736 magId "2022095736" @default.
- W2022095736 workType "article" @default.