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- W2022099059 abstract "In this work, we present a detailed study of the first vibration modes of a micro-tuning fork electrically actuated by means of a differential electrode lying on a piezoelectric AlN layer. The actuation through a differential electrode allows the optimal excitation of the modes of interest, including in-plane modes. Lateral and perpendicular displacements have been measured for a complete characterization of the resonator. Promising results have been obtained, including high values of the quality factor, which reach values above 4300 in air for the anti-phase in-plane modes." @default.
- W2022099059 created "2016-06-24" @default.
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- W2022099059 date "2011-05-04" @default.
- W2022099059 modified "2023-09-27" @default.
- W2022099059 title "Piezoelectric AlN-actuated micro-tuning forks for sensing applications" @default.
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- W2022099059 doi "https://doi.org/10.1117/12.886997" @default.
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