Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022100674> ?p ?o ?g. }
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with 100 items per page.
- W2022100674 endingPage "517" @default.
- W2022100674 startingPage "512" @default.
- W2022100674 abstract "Requirements for a new semiconductor grade material to replace silicon-on-sapphire have surfaced over the past few years. A number of alternate materials have been produced, the most promising of which is SIMOX: Separation by IMplantation of OXygen. Characteristics of this sandwich-like substrate formed by high dose implantation of oxygen ions are described. In particular,the methodology is reviewed of producing a high quality silicon surface layer, an insulating silicon dioxide subsurface layer, and its interface with the bulk silicon. A 100 mA (nominal) oxygen implanter meets the immediate need for this material, and a steady supply of SIMOX wafers is now available. Design criteria for higher volume machines are considered." @default.
- W2022100674 created "2016-06-24" @default.
- W2022100674 creator A5025184389 @default.
- W2022100674 creator A5033838073 @default.
- W2022100674 date "1989-02-01" @default.
- W2022100674 modified "2023-10-01" @default.
- W2022100674 title "SIMOX: Buried layer formation by ion implantation — Equipment and techniques" @default.
- W2022100674 cites W1984326487 @default.
- W2022100674 cites W2002771185 @default.
- W2022100674 cites W2012100860 @default.
- W2022100674 cites W2025646430 @default.
- W2022100674 cites W2070161956 @default.
- W2022100674 cites W2152022850 @default.
- W2022100674 doi "https://doi.org/10.1016/0168-583x(89)90235-8" @default.
- W2022100674 hasPublicationYear "1989" @default.
- W2022100674 type Work @default.
- W2022100674 sameAs 2022100674 @default.
- W2022100674 citedByCount "14" @default.
- W2022100674 crossrefType "journal-article" @default.
- W2022100674 hasAuthorship W2022100674A5025184389 @default.
- W2022100674 hasAuthorship W2022100674A5033838073 @default.
- W2022100674 hasConcept C108225325 @default.
- W2022100674 hasConcept C111368507 @default.
- W2022100674 hasConcept C120665830 @default.
- W2022100674 hasConcept C121332964 @default.
- W2022100674 hasConcept C127313418 @default.
- W2022100674 hasConcept C127413603 @default.
- W2022100674 hasConcept C145148216 @default.
- W2022100674 hasConcept C160671074 @default.
- W2022100674 hasConcept C171250308 @default.
- W2022100674 hasConcept C178790620 @default.
- W2022100674 hasConcept C185592680 @default.
- W2022100674 hasConcept C191897082 @default.
- W2022100674 hasConcept C192562407 @default.
- W2022100674 hasConcept C2777289219 @default.
- W2022100674 hasConcept C2779089622 @default.
- W2022100674 hasConcept C2779227376 @default.
- W2022100674 hasConcept C2780064504 @default.
- W2022100674 hasConcept C41823505 @default.
- W2022100674 hasConcept C49040817 @default.
- W2022100674 hasConcept C520434653 @default.
- W2022100674 hasConcept C540031477 @default.
- W2022100674 hasConcept C544956773 @default.
- W2022100674 hasConcept C61696701 @default.
- W2022100674 hasConceptScore W2022100674C108225325 @default.
- W2022100674 hasConceptScore W2022100674C111368507 @default.
- W2022100674 hasConceptScore W2022100674C120665830 @default.
- W2022100674 hasConceptScore W2022100674C121332964 @default.
- W2022100674 hasConceptScore W2022100674C127313418 @default.
- W2022100674 hasConceptScore W2022100674C127413603 @default.
- W2022100674 hasConceptScore W2022100674C145148216 @default.
- W2022100674 hasConceptScore W2022100674C160671074 @default.
- W2022100674 hasConceptScore W2022100674C171250308 @default.
- W2022100674 hasConceptScore W2022100674C178790620 @default.
- W2022100674 hasConceptScore W2022100674C185592680 @default.
- W2022100674 hasConceptScore W2022100674C191897082 @default.
- W2022100674 hasConceptScore W2022100674C192562407 @default.
- W2022100674 hasConceptScore W2022100674C2777289219 @default.
- W2022100674 hasConceptScore W2022100674C2779089622 @default.
- W2022100674 hasConceptScore W2022100674C2779227376 @default.
- W2022100674 hasConceptScore W2022100674C2780064504 @default.
- W2022100674 hasConceptScore W2022100674C41823505 @default.
- W2022100674 hasConceptScore W2022100674C49040817 @default.
- W2022100674 hasConceptScore W2022100674C520434653 @default.
- W2022100674 hasConceptScore W2022100674C540031477 @default.
- W2022100674 hasConceptScore W2022100674C544956773 @default.
- W2022100674 hasConceptScore W2022100674C61696701 @default.
- W2022100674 hasLocation W20221006741 @default.
- W2022100674 hasOpenAccess W2022100674 @default.
- W2022100674 hasPrimaryLocation W20221006741 @default.
- W2022100674 hasRelatedWork W1873547521 @default.
- W2022100674 hasRelatedWork W1990306124 @default.
- W2022100674 hasRelatedWork W2005572407 @default.
- W2022100674 hasRelatedWork W2021791336 @default.
- W2022100674 hasRelatedWork W2047621091 @default.
- W2022100674 hasRelatedWork W2169757209 @default.
- W2022100674 hasRelatedWork W2314841554 @default.
- W2022100674 hasRelatedWork W2319970007 @default.
- W2022100674 hasRelatedWork W2625730842 @default.
- W2022100674 hasRelatedWork W2770490537 @default.
- W2022100674 hasVolume "37-38" @default.
- W2022100674 isParatext "false" @default.
- W2022100674 isRetracted "false" @default.
- W2022100674 magId "2022100674" @default.
- W2022100674 workType "article" @default.