FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022103220> ?p ?o ?g. }

• W2022103220 endingPage "L24" @default.
• W2022103220 startingPage "L24" @default.
• W2022103220 abstract "The hot wire (HW) cell method has been newly developed and successfully applied to grow polycrystalline silicon films at low temperatures with a relatively high growth rate of 0.9–1.1 nm/s. In the HW cell method, mono silane (SiH 4 ) is decomposed by reacting with a heated tungsten wire placed near the substrate. It is found that polycrystalline silicon films can be obtained at substrate temperatures of 175–400°C without hydrogen dilution when the deposition pressure is 0.1 Torr." @default.
• W2022103220 created "2016-06-24" @default.
• W2022103220 creator A5022647498 @default.
• W2022103220 creator A5024974620 @default.
• W2022103220 creator A5056448365 @default.
• W2022103220 creator A5062654949 @default.
• W2022103220 date "1999-01-01" @default.
• W2022103220 modified "2023-09-25" @default.
• W2022103220 title "High Deposition Rate of Polycrystalline Silicon Thin Films Prepared by Hot Wire Cell Method" @default.
• W2022103220 cites W1713839181 @default.
• W2022103220 cites W1976771635 @default.
• W2022103220 cites W1982233968 @default.
• W2022103220 cites W2008620130 @default.
• W2022103220 cites W2060960057 @default.
• W2022103220 cites W2086008429 @default.
• W2022103220 doi "https://doi.org/10.1143/jjap.38.l24" @default.
• W2022103220 hasPublicationYear "1999" @default.
• W2022103220 type Work @default.
• W2022103220 sameAs 2022103220 @default.
• W2022103220 citedByCount "21" @default.
• W2022103220 crossrefType "journal-article" @default.
• W2022103220 hasAuthorship W2022103220A5022647498 @default.
• W2022103220 hasAuthorship W2022103220A5024974620 @default.
• W2022103220 hasAuthorship W2022103220A5056448365 @default.
• W2022103220 hasAuthorship W2022103220A5062654949 @default.
• W2022103220 hasConcept C111368507 @default.
• W2022103220 hasConcept C113196181 @default.
• W2022103220 hasConcept C121332964 @default.
• W2022103220 hasConcept C127313418 @default.
• W2022103220 hasConcept C137637335 @default.
• W2022103220 hasConcept C151730666 @default.
• W2022103220 hasConcept C159985019 @default.
• W2022103220 hasConcept C171250308 @default.
• W2022103220 hasConcept C178790620 @default.
• W2022103220 hasConcept C185592680 @default.
• W2022103220 hasConcept C19067145 @default.
• W2022103220 hasConcept C191897082 @default.
• W2022103220 hasConcept C192562407 @default.
• W2022103220 hasConcept C2776390347 @default.
• W2022103220 hasConcept C2777289219 @default.
• W2022103220 hasConcept C2778024649 @default.
• W2022103220 hasConcept C2779227376 @default.
• W2022103220 hasConcept C2779667780 @default.
• W2022103220 hasConcept C2780565262 @default.
• W2022103220 hasConcept C2816523 @default.
• W2022103220 hasConcept C30646810 @default.
• W2022103220 hasConcept C43617362 @default.
• W2022103220 hasConcept C512968161 @default.
• W2022103220 hasConcept C542268612 @default.
• W2022103220 hasConcept C544956773 @default.
• W2022103220 hasConcept C64297162 @default.
• W2022103220 hasConcept C80086925 @default.
• W2022103220 hasConcept C86803240 @default.
• W2022103220 hasConcept C87359718 @default.
• W2022103220 hasConcept C97355855 @default.
• W2022103220 hasConceptScore W2022103220C111368507 @default.
• W2022103220 hasConceptScore W2022103220C113196181 @default.
• W2022103220 hasConceptScore W2022103220C121332964 @default.
• W2022103220 hasConceptScore W2022103220C127313418 @default.
• W2022103220 hasConceptScore W2022103220C137637335 @default.
• W2022103220 hasConceptScore W2022103220C151730666 @default.
• W2022103220 hasConceptScore W2022103220C159985019 @default.
• W2022103220 hasConceptScore W2022103220C171250308 @default.
• W2022103220 hasConceptScore W2022103220C178790620 @default.
• W2022103220 hasConceptScore W2022103220C185592680 @default.
• W2022103220 hasConceptScore W2022103220C19067145 @default.
• W2022103220 hasConceptScore W2022103220C191897082 @default.
• W2022103220 hasConceptScore W2022103220C192562407 @default.
• W2022103220 hasConceptScore W2022103220C2776390347 @default.
• W2022103220 hasConceptScore W2022103220C2777289219 @default.
• W2022103220 hasConceptScore W2022103220C2778024649 @default.
• W2022103220 hasConceptScore W2022103220C2779227376 @default.
• W2022103220 hasConceptScore W2022103220C2779667780 @default.
• W2022103220 hasConceptScore W2022103220C2780565262 @default.
• W2022103220 hasConceptScore W2022103220C2816523 @default.
• W2022103220 hasConceptScore W2022103220C30646810 @default.
• W2022103220 hasConceptScore W2022103220C43617362 @default.
• W2022103220 hasConceptScore W2022103220C512968161 @default.
• W2022103220 hasConceptScore W2022103220C542268612 @default.
• W2022103220 hasConceptScore W2022103220C544956773 @default.
• W2022103220 hasConceptScore W2022103220C64297162 @default.
• W2022103220 hasConceptScore W2022103220C80086925 @default.
• W2022103220 hasConceptScore W2022103220C86803240 @default.
• W2022103220 hasConceptScore W2022103220C87359718 @default.
• W2022103220 hasConceptScore W2022103220C97355855 @default.
• W2022103220 hasIssue "1A" @default.
• W2022103220 hasLocation W20221032201 @default.
• W2022103220 hasOpenAccess W2022103220 @default.
• W2022103220 hasPrimaryLocation W20221032201 @default.
• W2022103220 hasRelatedWork W1553019763 @default.
• W2022103220 hasRelatedWork W1988471475 @default.
• W2022103220 hasRelatedWork W1993021236 @default.
• W2022103220 hasRelatedWork W2000645312 @default.
• W2022103220 hasRelatedWork W2006219958 @default.
• W2022103220 hasRelatedWork W2020360830 @default.
• W2022103220 hasRelatedWork W2022103220 @default.
• W2022103220 hasRelatedWork W2072406123 @default.
• W2022103220 hasRelatedWork W2090721918 @default.

• next