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- W2022115 abstract "The composition of carbon discharges were investigated during reactive high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS) using mass spectroscopy measur ..." @default.
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- W2022115 date "2012-01-01" @default.
- W2022115 modified "2023-09-27" @default.
- W2022115 title "Ion mass spectroscopy investigations during high power pulsed 1 magnetron sputtering and DCMS of Carbon in an Ar and Ar/N2 discharge" @default.
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