Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022128302> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2022128302 endingPage "1543" @default.
- W2022128302 startingPage "1541" @default.
- W2022128302 abstract "Depth profiling was done by secondary ion mass spectrometry (SIMS) on SiO2/Si3N4/SiO2 (ONO) structures to determine if the nitrogen tail seen going into the silicon substrate was real or an artifact of ion bombardment. To determine this without an element of doubt, samples were thinned from the back side to the ONO layer and SIMS depth profiling was carried out on the exposed underside of ONO. It is determined that the layer of ‘‘nitride’’ at the Si/oxide interface is really an artifact of ion bombardment. Profiling from the back side shows there is no nitrogen tail in the silicon substrate and there is also no nitride at the oxide/Si interface. The interfacial nitride layer, and the apparent nitrogen tail extending into the underlying Si, seen from front-side profiling, are due to anomalous nitrogen diffusion during ion bombardment. It is believed that nitrogen-oxygen complexes are formed in the silicon substrate as a result of nitridation, and this adversely affects device performance. Though this may still be true, one needs to be cautious in interpreting SIMS and Auger depth profiles from the front side in order to corroborate the electrical results." @default.
- W2022128302 created "2016-06-24" @default.
- W2022128302 creator A5015011688 @default.
- W2022128302 creator A5049834592 @default.
- W2022128302 date "1993-03-29" @default.
- W2022128302 modified "2023-10-16" @default.
- W2022128302 title "Anomalous diffusion of nitrogen in SiO2under ion bombardment" @default.
- W2022128302 cites W1986904369 @default.
- W2022128302 cites W2039170316 @default.
- W2022128302 cites W2039403527 @default.
- W2022128302 cites W2087067569 @default.
- W2022128302 cites W2092757271 @default.
- W2022128302 cites W2161217037 @default.
- W2022128302 doi "https://doi.org/10.1063/1.108634" @default.
- W2022128302 hasPublicationYear "1993" @default.
- W2022128302 type Work @default.
- W2022128302 sameAs 2022128302 @default.
- W2022128302 citedByCount "21" @default.
- W2022128302 countsByYear W20221283022012 @default.
- W2022128302 countsByYear W20221283022015 @default.
- W2022128302 countsByYear W20221283022017 @default.
- W2022128302 crossrefType "journal-article" @default.
- W2022128302 hasAuthorship W2022128302A5015011688 @default.
- W2022128302 hasAuthorship W2022128302A5049834592 @default.
- W2022128302 hasConcept C111368507 @default.
- W2022128302 hasConcept C113196181 @default.
- W2022128302 hasConcept C121332964 @default.
- W2022128302 hasConcept C127313418 @default.
- W2022128302 hasConcept C145148216 @default.
- W2022128302 hasConcept C171250308 @default.
- W2022128302 hasConcept C178790620 @default.
- W2022128302 hasConcept C184779094 @default.
- W2022128302 hasConcept C185592680 @default.
- W2022128302 hasConcept C19067145 @default.
- W2022128302 hasConcept C191897082 @default.
- W2022128302 hasConcept C192562407 @default.
- W2022128302 hasConcept C194760766 @default.
- W2022128302 hasConcept C22423302 @default.
- W2022128302 hasConcept C2777289219 @default.
- W2022128302 hasConcept C2777431650 @default.
- W2022128302 hasConcept C2779227376 @default.
- W2022128302 hasConcept C2779851234 @default.
- W2022128302 hasConcept C2780646311 @default.
- W2022128302 hasConcept C43617362 @default.
- W2022128302 hasConcept C49040817 @default.
- W2022128302 hasConcept C537208039 @default.
- W2022128302 hasConcept C544956773 @default.
- W2022128302 hasConcept C77671233 @default.
- W2022128302 hasConceptScore W2022128302C111368507 @default.
- W2022128302 hasConceptScore W2022128302C113196181 @default.
- W2022128302 hasConceptScore W2022128302C121332964 @default.
- W2022128302 hasConceptScore W2022128302C127313418 @default.
- W2022128302 hasConceptScore W2022128302C145148216 @default.
- W2022128302 hasConceptScore W2022128302C171250308 @default.
- W2022128302 hasConceptScore W2022128302C178790620 @default.
- W2022128302 hasConceptScore W2022128302C184779094 @default.
- W2022128302 hasConceptScore W2022128302C185592680 @default.
- W2022128302 hasConceptScore W2022128302C19067145 @default.
- W2022128302 hasConceptScore W2022128302C191897082 @default.
- W2022128302 hasConceptScore W2022128302C192562407 @default.
- W2022128302 hasConceptScore W2022128302C194760766 @default.
- W2022128302 hasConceptScore W2022128302C22423302 @default.
- W2022128302 hasConceptScore W2022128302C2777289219 @default.
- W2022128302 hasConceptScore W2022128302C2777431650 @default.
- W2022128302 hasConceptScore W2022128302C2779227376 @default.
- W2022128302 hasConceptScore W2022128302C2779851234 @default.
- W2022128302 hasConceptScore W2022128302C2780646311 @default.
- W2022128302 hasConceptScore W2022128302C43617362 @default.
- W2022128302 hasConceptScore W2022128302C49040817 @default.
- W2022128302 hasConceptScore W2022128302C537208039 @default.
- W2022128302 hasConceptScore W2022128302C544956773 @default.
- W2022128302 hasConceptScore W2022128302C77671233 @default.
- W2022128302 hasIssue "13" @default.
- W2022128302 hasLocation W20221283021 @default.
- W2022128302 hasOpenAccess W2022128302 @default.
- W2022128302 hasPrimaryLocation W20221283021 @default.
- W2022128302 hasRelatedWork W1974891863 @default.
- W2022128302 hasRelatedWork W1994271692 @default.
- W2022128302 hasRelatedWork W2000059195 @default.
- W2022128302 hasRelatedWork W2074148262 @default.
- W2022128302 hasRelatedWork W2085472019 @default.
- W2022128302 hasRelatedWork W2091966810 @default.
- W2022128302 hasRelatedWork W2092931996 @default.
- W2022128302 hasRelatedWork W4206854469 @default.
- W2022128302 hasRelatedWork W4232086732 @default.
- W2022128302 hasRelatedWork W800455656 @default.
- W2022128302 hasVolume "62" @default.
- W2022128302 isParatext "false" @default.
- W2022128302 isRetracted "false" @default.
- W2022128302 magId "2022128302" @default.
- W2022128302 workType "article" @default.