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- W2022131416 abstract "Abstract This study demonstrated the optimization of a pulsed carbon dioxide (CO 2 ) snow jet system for the removal of particles on the surface of complementary metal oxide semiconductor (CMOS) image sensors by using the Taguchi method. The parameters of the CO 2 snow cleaning system, which can have an influence on the residue rate of particles, were optimized, resulting in optimal values of 15° incident angle, 40 mm cleaning distance, 0.30 mm orifice size, and a 50 ms time-base with above 95% confidence. A novel pulsed CO 2 snow jet, triggered by ordered pulsing signals, was introduced to the experiments for solving the cryogenic effect on the surface. The pulsed CO 2 snow jet gained a total of 10.6 °C difference in average temperature on the substrate surface. So, not only did we achieve less (even none at all) hot air consumption, but we also achieved less CO 2 consumption. Due to the optimization, the average residual particle rate can be controlled, and all particles larger than 2 μm will be removed." @default.
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- W2022131416 date "2007-09-01" @default.
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- W2022131416 title "Optimization of a pulsed carbon dioxide snow jet for cleaning CMOS image sensors by using the Taguchi method" @default.
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- W2022131416 doi "https://doi.org/10.1016/j.sna.2006.10.027" @default.
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