Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022139610> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2022139610 endingPage "111" @default.
- W2022139610 startingPage "105" @default.
- W2022139610 abstract "Laser-produced plasma sources of short-wavelength radiation offer an interesting alternative to synchrotron and free-electron laser installations. Recently, we reported on a newly developed desktop EUV microscope based on plasma generated from a gas-puff target and diffractive optics. The half-pitch resolution of the microscope approached 50 nm. Compared to analogous microscopes based on synchrotron sources, our system is compact and cost-effective. In this paper, we present the results of imaging experiments on a thin polycrystalline object that was carried out in order to further examine the applicability of the microscope. We have demonstrated here that EUV microscopy can provide structural information that cannot be accessed by conventional optical microscopy or SEM." @default.
- W2022139610 created "2016-06-24" @default.
- W2022139610 creator A5006032696 @default.
- W2022139610 creator A5016518066 @default.
- W2022139610 creator A5034561361 @default.
- W2022139610 creator A5055515591 @default.
- W2022139610 creator A5087522946 @default.
- W2022139610 date "2012-09-16" @default.
- W2022139610 modified "2023-10-02" @default.
- W2022139610 title "Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope" @default.
- W2022139610 cites W1963536954 @default.
- W2022139610 cites W1968944634 @default.
- W2022139610 cites W1987620734 @default.
- W2022139610 cites W1991373827 @default.
- W2022139610 cites W2017015636 @default.
- W2022139610 cites W2033481297 @default.
- W2022139610 cites W2033626867 @default.
- W2022139610 cites W2075365289 @default.
- W2022139610 cites W2081146886 @default.
- W2022139610 cites W2085116231 @default.
- W2022139610 cites W2092137862 @default.
- W2022139610 cites W2093078797 @default.
- W2022139610 cites W2134545941 @default.
- W2022139610 cites W2168260595 @default.
- W2022139610 doi "https://doi.org/10.1007/s00340-012-5125-3" @default.
- W2022139610 hasPublicationYear "2012" @default.
- W2022139610 type Work @default.
- W2022139610 sameAs 2022139610 @default.
- W2022139610 citedByCount "11" @default.
- W2022139610 countsByYear W20221396102013 @default.
- W2022139610 countsByYear W20221396102014 @default.
- W2022139610 countsByYear W20221396102015 @default.
- W2022139610 countsByYear W20221396102016 @default.
- W2022139610 countsByYear W20221396102019 @default.
- W2022139610 countsByYear W20221396102020 @default.
- W2022139610 crossrefType "journal-article" @default.
- W2022139610 hasAuthorship W2022139610A5006032696 @default.
- W2022139610 hasAuthorship W2022139610A5016518066 @default.
- W2022139610 hasAuthorship W2022139610A5034561361 @default.
- W2022139610 hasAuthorship W2022139610A5055515591 @default.
- W2022139610 hasAuthorship W2022139610A5087522946 @default.
- W2022139610 hasBestOaLocation W20221396101 @default.
- W2022139610 hasConcept C120665830 @default.
- W2022139610 hasConcept C121332964 @default.
- W2022139610 hasConcept C138268822 @default.
- W2022139610 hasConcept C147080431 @default.
- W2022139610 hasConcept C154945302 @default.
- W2022139610 hasConcept C162996421 @default.
- W2022139610 hasConcept C16332341 @default.
- W2022139610 hasConcept C192562407 @default.
- W2022139610 hasConcept C205372480 @default.
- W2022139610 hasConcept C21368211 @default.
- W2022139610 hasConcept C26771246 @default.
- W2022139610 hasConcept C41008148 @default.
- W2022139610 hasConcept C520434653 @default.
- W2022139610 hasConcept C6260449 @default.
- W2022139610 hasConcept C67649825 @default.
- W2022139610 hasConcept C77017923 @default.
- W2022139610 hasConcept C93877712 @default.
- W2022139610 hasConceptScore W2022139610C120665830 @default.
- W2022139610 hasConceptScore W2022139610C121332964 @default.
- W2022139610 hasConceptScore W2022139610C138268822 @default.
- W2022139610 hasConceptScore W2022139610C147080431 @default.
- W2022139610 hasConceptScore W2022139610C154945302 @default.
- W2022139610 hasConceptScore W2022139610C162996421 @default.
- W2022139610 hasConceptScore W2022139610C16332341 @default.
- W2022139610 hasConceptScore W2022139610C192562407 @default.
- W2022139610 hasConceptScore W2022139610C205372480 @default.
- W2022139610 hasConceptScore W2022139610C21368211 @default.
- W2022139610 hasConceptScore W2022139610C26771246 @default.
- W2022139610 hasConceptScore W2022139610C41008148 @default.
- W2022139610 hasConceptScore W2022139610C520434653 @default.
- W2022139610 hasConceptScore W2022139610C6260449 @default.
- W2022139610 hasConceptScore W2022139610C67649825 @default.
- W2022139610 hasConceptScore W2022139610C77017923 @default.
- W2022139610 hasConceptScore W2022139610C93877712 @default.
- W2022139610 hasIssue "1" @default.
- W2022139610 hasLocation W20221396101 @default.
- W2022139610 hasOpenAccess W2022139610 @default.
- W2022139610 hasPrimaryLocation W20221396101 @default.
- W2022139610 hasRelatedWork W1607724679 @default.
- W2022139610 hasRelatedWork W2027698525 @default.
- W2022139610 hasRelatedWork W2063217361 @default.
- W2022139610 hasRelatedWork W2072332106 @default.
- W2022139610 hasRelatedWork W2094066981 @default.
- W2022139610 hasRelatedWork W2120598546 @default.
- W2022139610 hasRelatedWork W2156264848 @default.
- W2022139610 hasRelatedWork W2323149333 @default.
- W2022139610 hasRelatedWork W2797351134 @default.
- W2022139610 hasRelatedWork W3035875336 @default.
- W2022139610 hasVolume "109" @default.
- W2022139610 isParatext "false" @default.
- W2022139610 isRetracted "false" @default.
- W2022139610 magId "2022139610" @default.
- W2022139610 workType "article" @default.