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- W2022143194 abstract "Formulation of a viscoelastic stress problem adopting an analytical integration scheme, which was originally proposed by Peng and co-authors [Proc. Symp. Process Physics and Modeling in Semiconductor Technology, Manchester, 1991, p. 772; COMPEL 10 (1991) 341], is given in a complete form. This formulation includes the treatment of initial strain, an implicit solution method, and improvement of the solution by successive iteration. According to the formulation, a two-dimensional oxidation program is made. Through the calculations of oxidation of a simple test structure, it is reconfirmed that numerical instability can be improved by adopting the scheme of Peng and co-authors [Proc. Symp. Process Physics and Modeling in Semiconductor Technology, Manchester, 1991, p. 772; COMPEL 10 (1991) 341]. Other aspects of the behavior of the solution, including the dependence of the solution on the magnitude of time steps, are also shown." @default.
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- W2022143194 date "2001-12-01" @default.
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- W2022143194 title "Formulation of a Viscoelastic Stress Problem Using Analytical Integration and Its Application to Viscoelastic Oxidation Simulation" @default.
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