Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022144265> ?p ?o ?g. }
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- W2022144265 endingPage "454" @default.
- W2022144265 startingPage "451" @default.
- W2022144265 abstract "In this study, we examined Ar+ ion sputter etching rate ratio RAl203/RSiO2 under different surface charging conditions and in different incident azimuthal directions of Ar+ ion. When the surface charging of specimen was neutralized by irradiation with low-energy electrons, RAl2O3 became larger than that of specimens without any electron irradiation at same ion current density. When the specimen was bombarded by Ar+ ion from the azimuthal direction parallel to the a-axis on the surface of Al2O3 single crystal, RAl2O3/RSiO2 became higher than that of specimen bombarded from the azimuthal direction vertical to the a-axis. The effects of surface charging and incident azimuthal direction of Ar+ ion on RAl2O3/RSiO2 are discussed respectively on the basis of the experimental results." @default.
- W2022144265 created "2016-06-24" @default.
- W2022144265 creator A5004386898 @default.
- W2022144265 creator A5011228207 @default.
- W2022144265 creator A5013532271 @default.
- W2022144265 date "2002-01-01" @default.
- W2022144265 modified "2023-09-25" @default.
- W2022144265 title "Effects of Charging and Crystallinity on Sputter-Etching Rate of Al2O3 Single Crystal" @default.
- W2022144265 cites W2912623915 @default.
- W2022144265 doi "https://doi.org/10.1384/jsa.9.451" @default.
- W2022144265 hasPublicationYear "2002" @default.
- W2022144265 type Work @default.
- W2022144265 sameAs 2022144265 @default.
- W2022144265 citedByCount "3" @default.
- W2022144265 countsByYear W20221442652022 @default.
- W2022144265 crossrefType "journal-article" @default.
- W2022144265 hasAuthorship W2022144265A5004386898 @default.
- W2022144265 hasAuthorship W2022144265A5011228207 @default.
- W2022144265 hasAuthorship W2022144265A5013532271 @default.
- W2022144265 hasBestOaLocation W20221442651 @default.
- W2022144265 hasConcept C100460472 @default.
- W2022144265 hasConcept C127413603 @default.
- W2022144265 hasConcept C159985019 @default.
- W2022144265 hasConcept C171250308 @default.
- W2022144265 hasConcept C185592680 @default.
- W2022144265 hasConcept C19067145 @default.
- W2022144265 hasConcept C192562407 @default.
- W2022144265 hasConcept C199360897 @default.
- W2022144265 hasConcept C22423302 @default.
- W2022144265 hasConcept C2779227376 @default.
- W2022144265 hasConcept C2781285689 @default.
- W2022144265 hasConcept C41008148 @default.
- W2022144265 hasConcept C42360764 @default.
- W2022144265 hasConcept C46275449 @default.
- W2022144265 hasConcept C49040817 @default.
- W2022144265 hasConcept C73922627 @default.
- W2022144265 hasConcept C8010536 @default.
- W2022144265 hasConceptScore W2022144265C100460472 @default.
- W2022144265 hasConceptScore W2022144265C127413603 @default.
- W2022144265 hasConceptScore W2022144265C159985019 @default.
- W2022144265 hasConceptScore W2022144265C171250308 @default.
- W2022144265 hasConceptScore W2022144265C185592680 @default.
- W2022144265 hasConceptScore W2022144265C19067145 @default.
- W2022144265 hasConceptScore W2022144265C192562407 @default.
- W2022144265 hasConceptScore W2022144265C199360897 @default.
- W2022144265 hasConceptScore W2022144265C22423302 @default.
- W2022144265 hasConceptScore W2022144265C2779227376 @default.
- W2022144265 hasConceptScore W2022144265C2781285689 @default.
- W2022144265 hasConceptScore W2022144265C41008148 @default.
- W2022144265 hasConceptScore W2022144265C42360764 @default.
- W2022144265 hasConceptScore W2022144265C46275449 @default.
- W2022144265 hasConceptScore W2022144265C49040817 @default.
- W2022144265 hasConceptScore W2022144265C73922627 @default.
- W2022144265 hasConceptScore W2022144265C8010536 @default.
- W2022144265 hasIssue "3" @default.
- W2022144265 hasLocation W20221442651 @default.
- W2022144265 hasOpenAccess W2022144265 @default.
- W2022144265 hasPrimaryLocation W20221442651 @default.
- W2022144265 hasRelatedWork W1749761415 @default.
- W2022144265 hasRelatedWork W1996405093 @default.
- W2022144265 hasRelatedWork W2011458606 @default.
- W2022144265 hasRelatedWork W2064962644 @default.
- W2022144265 hasRelatedWork W2082524862 @default.
- W2022144265 hasRelatedWork W2141647292 @default.
- W2022144265 hasRelatedWork W2334397418 @default.
- W2022144265 hasRelatedWork W2537505475 @default.
- W2022144265 hasRelatedWork W2593395038 @default.
- W2022144265 hasRelatedWork W282779662 @default.
- W2022144265 hasVolume "9" @default.
- W2022144265 isParatext "false" @default.
- W2022144265 isRetracted "false" @default.
- W2022144265 magId "2022144265" @default.
- W2022144265 workType "article" @default.