Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022152879> ?p ?o ?g. }
- W2022152879 endingPage "1767" @default.
- W2022152879 startingPage "1758" @default.
- W2022152879 abstract "Abstract The history of the development of photoresists based on the photostructural transformations in chalcogenide glassy semiconductors is discussed in this paper. The properties of such photoresists including the possibility of an essential increase of their photosensitivity and also applications are examined. Together with the photoresists, the chalcogenide glassy roentgen‐, electron beam‐, and plasma‐resists are briefly considered." @default.
- W2022152879 created "2016-06-24" @default.
- W2022152879 creator A5084999716 @default.
- W2022152879 date "2009-07-27" @default.
- W2022152879 modified "2023-10-18" @default.
- W2022152879 title "Chalcogenide glassy photoresists: History of development, properties, and applications" @default.
- W2022152879 cites W1981056107 @default.
- W2022152879 cites W1990274584 @default.
- W2022152879 cites W1994584830 @default.
- W2022152879 cites W1996613237 @default.
- W2022152879 cites W1997220304 @default.
- W2022152879 cites W1998756960 @default.
- W2022152879 cites W2000297822 @default.
- W2022152879 cites W2000884644 @default.
- W2022152879 cites W2001414412 @default.
- W2022152879 cites W2006759748 @default.
- W2022152879 cites W2012216377 @default.
- W2022152879 cites W2025169742 @default.
- W2022152879 cites W2026967381 @default.
- W2022152879 cites W2026985491 @default.
- W2022152879 cites W2027229628 @default.
- W2022152879 cites W2036498470 @default.
- W2022152879 cites W2041902055 @default.
- W2022152879 cites W2054501566 @default.
- W2022152879 cites W2057175513 @default.
- W2022152879 cites W2058212204 @default.
- W2022152879 cites W2062304077 @default.
- W2022152879 cites W2064041749 @default.
- W2022152879 cites W2071801565 @default.
- W2022152879 cites W2074466073 @default.
- W2022152879 cites W2075689277 @default.
- W2022152879 cites W2078439359 @default.
- W2022152879 cites W2082022032 @default.
- W2022152879 cites W2085399772 @default.
- W2022152879 cites W2085938034 @default.
- W2022152879 cites W2090879842 @default.
- W2022152879 cites W2091241253 @default.
- W2022152879 cites W2092485288 @default.
- W2022152879 cites W2093131685 @default.
- W2022152879 cites W2116531827 @default.
- W2022152879 cites W2134635082 @default.
- W2022152879 cites W90156566 @default.
- W2022152879 doi "https://doi.org/10.1002/pssb.200982003" @default.
- W2022152879 hasPublicationYear "2009" @default.
- W2022152879 type Work @default.
- W2022152879 sameAs 2022152879 @default.
- W2022152879 citedByCount "23" @default.
- W2022152879 countsByYear W20221528792012 @default.
- W2022152879 countsByYear W20221528792013 @default.
- W2022152879 countsByYear W20221528792014 @default.
- W2022152879 countsByYear W20221528792015 @default.
- W2022152879 countsByYear W20221528792016 @default.
- W2022152879 countsByYear W20221528792017 @default.
- W2022152879 countsByYear W20221528792018 @default.
- W2022152879 countsByYear W20221528792019 @default.
- W2022152879 countsByYear W20221528792020 @default.
- W2022152879 countsByYear W20221528792021 @default.
- W2022152879 crossrefType "journal-article" @default.
- W2022152879 hasAuthorship W2022152879A5084999716 @default.
- W2022152879 hasConcept C108225325 @default.
- W2022152879 hasConcept C112234648 @default.
- W2022152879 hasConcept C120665830 @default.
- W2022152879 hasConcept C121332964 @default.
- W2022152879 hasConcept C134406635 @default.
- W2022152879 hasConcept C171250308 @default.
- W2022152879 hasConcept C186807665 @default.
- W2022152879 hasConcept C192562407 @default.
- W2022152879 hasConcept C2778177714 @default.
- W2022152879 hasConcept C2779227376 @default.
- W2022152879 hasConcept C49040817 @default.
- W2022152879 hasConcept C53524968 @default.
- W2022152879 hasConceptScore W2022152879C108225325 @default.
- W2022152879 hasConceptScore W2022152879C112234648 @default.
- W2022152879 hasConceptScore W2022152879C120665830 @default.
- W2022152879 hasConceptScore W2022152879C121332964 @default.
- W2022152879 hasConceptScore W2022152879C134406635 @default.
- W2022152879 hasConceptScore W2022152879C171250308 @default.
- W2022152879 hasConceptScore W2022152879C186807665 @default.
- W2022152879 hasConceptScore W2022152879C192562407 @default.
- W2022152879 hasConceptScore W2022152879C2778177714 @default.
- W2022152879 hasConceptScore W2022152879C2779227376 @default.
- W2022152879 hasConceptScore W2022152879C49040817 @default.
- W2022152879 hasConceptScore W2022152879C53524968 @default.
- W2022152879 hasIssue "8" @default.
- W2022152879 hasLocation W20221528791 @default.
- W2022152879 hasOpenAccess W2022152879 @default.
- W2022152879 hasPrimaryLocation W20221528791 @default.
- W2022152879 hasRelatedWork W1485395888 @default.
- W2022152879 hasRelatedWork W1990950348 @default.
- W2022152879 hasRelatedWork W1999595755 @default.
- W2022152879 hasRelatedWork W2045098484 @default.
- W2022152879 hasRelatedWork W2072406806 @default.
- W2022152879 hasRelatedWork W2321285900 @default.
- W2022152879 hasRelatedWork W2389003881 @default.
- W2022152879 hasRelatedWork W2494840078 @default.
- W2022152879 hasRelatedWork W2920584510 @default.
- W2022152879 hasRelatedWork W3173908830 @default.
- W2022152879 hasVolume "246" @default.