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- W2022163341 abstract "It was shown that Ge<SUP>+</SUP>-implanted SiO<SUB>2</SUB> thermally grown on crystalline Si is one of the most promising materials for Si-based light emission. This material exhibits strong violet photo-(PL) and electroluminescence (EL) at room temperature, which is well visible by the naked eye at ambient light. In detail, the PL spectra of Ge-rich layers peaking around 400 nm reach a maximum after annealing at 500 degrees Celsius to 800 degrees Celsius for Ge concentrations in the range of 0.3 to 2 at%. Based on PL excitation (PLE) spectra we tentatively interpret the violet PL as due to the neutral oxygen vacancy typical for Si-rich SiO<SUB>2</SUB> and similar Ge- related defects in Ge<SUP>+</SUP>-implanted silicon dioxide. EL and electrical measurements were carried out at MOS capacitors using a transparent ITO and a thick Al front contact, respectively. The I-V-dependence exhibiting the typical behavior of Fowler-Nordheim tunneling shows an increase of the breakdown voltage and the tunneling current for Ge-rich oxide in comparison to the unimplanted material. The EL spectrum of the Ge-implanted oxide correlates very well with the PL one. The EL intensity shows a linear dependence on the injected current over three orders of magnitude. EL efficiencies up to 5 X 10<SUP>-4</SUP> for Ge<SUP>+</SUP>-implanted silicon dioxide were found." @default.
- W2022163341 created "2016-06-24" @default.
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- W2022163341 date "1999-03-19" @default.
- W2022163341 modified "2023-09-23" @default.
- W2022163341 title "Strong violet light emission from Ge+-implanted SiO 2 layers" @default.
- W2022163341 doi "https://doi.org/10.1117/12.342785" @default.
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