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- W2022170246 abstract "ABSTRACT This study concerns the automatic high precision beam collimation system using the Talbot interferometry. When the collima-tion beam is obtained placed point-source of light in focal position of the collimation lens, the defocus value is calculated f roma moire fringe width in the Talbot interferometry using only two grating. With the advance of collimation, the moire fringe ca nnotbe confirmed. Using the movement of moire fringe when one of grating shifts, the expanded moire fringe width is measured high-precisely from the phase difference of intensity change of two detecting points, using peak position of the cross-correlationcoefficient. With the result of the defocus value, the collimator lens is positioned by motor controller. Keywords : collimation, Talbot interferometry, moire fringe, phase difference, cross-correlation coefficient1. INTRODUCTION Because of high precision measurement to be realized for micro/nano-technology, some optical measurement systems have beenproposed and reported" @default.
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- W2022170246 date "2001-05-08" @default.
- W2022170246 modified "2023-09-23" @default.
- W2022170246 title "Automatic collimation system by Talbot interferometry" @default.
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- W2022170246 doi "https://doi.org/10.1117/12.427092" @default.
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