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- W2022174072 abstract "We present a 2 mm diameter, 35 μm thick disk resonator gyro (DRG) fabricated in <111> silicon with integrated 0.35 μm CMOS analog front-end circuits in the Invensense NF process. This process incorporates a wafer-level vacuum seal, yielding a quality factor (Q) of 2800 at the DRG's 78 kHz resonance frequency. After performing electrostatic tuning to enable mode-matched operation, this DRG achieves a 63 μV/°/s sensitivity. Resonator vibration in the sense and drive axes is sensed using capacitive transduction, and amplified using a low-noise, on-chip integrated circuit. This allows the DRG to achieve Brownian noise-limited performance. The angle random walk (ARW) is measured to be 0.01 (˚/sec)/√Hz and the bias instability is 30 °/hr." @default.
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- W2022174072 date "2013-11-01" @default.
- W2022174072 modified "2023-10-14" @default.
- W2022174072 title "MEMS disk resonator gyroscope with integrated analog front-end" @default.
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- W2022174072 doi "https://doi.org/10.1109/icsens.2013.6688164" @default.
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