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- W2022178736 abstract "A novel testing-pad placement method has been developed to greatly improve the electron-beam testing observability of multi-metal-layer LSIs. The pads consist of such small stacked vias that they can be placed in any unoccupied area of an LSI layout without any change in chip size. The observability is more than 88% for a 0.25um 390kG ASIC with this method." @default.
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- W2022178736 date "1997-10-01" @default.
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- W2022178736 title "Automated placement of testing pads for electron-beam observation" @default.
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- W2022178736 doi "https://doi.org/10.1016/s0026-2714(97)00111-x" @default.
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