Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022182354> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2022182354 endingPage "6" @default.
- W2022182354 startingPage "4" @default.
- W2022182354 abstract "CrN and Cr2N layers of 130–250 nm thickness were deposited onto silicon substrates via reactive magnetron sputtering. Their oxidation at 500–800 °C in air was studied via depth profiling nuclear methods. The Cr and N concentration profiles were determined by Rutherford backscattering spectrometry and resonant nuclear reaction analysis, respectively. In the case of oxidizing Cr2N, the nitrogen content behind the Cr2O3/Cr2N interface increases to the stoichiometry of CrN. At a Cr2O3 layer thickness of about half the as-deposited Cr2N layer, the oxidation rate is reduced to that fo CrN." @default.
- W2022182354 created "2016-06-24" @default.
- W2022182354 creator A5072711028 @default.
- W2022182354 creator A5073112722 @default.
- W2022182354 date "1994-06-01" @default.
- W2022182354 modified "2023-09-26" @default.
- W2022182354 title "Oxidation of thin CrN and Cr2N films analyzed via nuclear reaction analysis and Rutherford backscattering spectrometry" @default.
- W2022182354 cites W1965579721 @default.
- W2022182354 cites W1966725671 @default.
- W2022182354 cites W1977217404 @default.
- W2022182354 cites W1983329315 @default.
- W2022182354 cites W2017169354 @default.
- W2022182354 cites W2022690425 @default.
- W2022182354 cites W2026466174 @default.
- W2022182354 cites W2035037317 @default.
- W2022182354 cites W2058332349 @default.
- W2022182354 cites W2060090703 @default.
- W2022182354 cites W2071751739 @default.
- W2022182354 cites W2086572018 @default.
- W2022182354 cites W2095614042 @default.
- W2022182354 doi "https://doi.org/10.1016/0040-6090(94)90868-0" @default.
- W2022182354 hasPublicationYear "1994" @default.
- W2022182354 type Work @default.
- W2022182354 sameAs 2022182354 @default.
- W2022182354 citedByCount "47" @default.
- W2022182354 countsByYear W20221823542013 @default.
- W2022182354 countsByYear W20221823542014 @default.
- W2022182354 countsByYear W20221823542017 @default.
- W2022182354 countsByYear W20221823542022 @default.
- W2022182354 crossrefType "journal-article" @default.
- W2022182354 hasAuthorship W2022182354A5072711028 @default.
- W2022182354 hasAuthorship W2022182354A5073112722 @default.
- W2022182354 hasConcept C113196181 @default.
- W2022182354 hasConcept C144082473 @default.
- W2022182354 hasConcept C145148216 @default.
- W2022182354 hasConcept C147789679 @default.
- W2022182354 hasConcept C162356407 @default.
- W2022182354 hasConcept C171250308 @default.
- W2022182354 hasConcept C177322064 @default.
- W2022182354 hasConcept C178790620 @default.
- W2022182354 hasConcept C185592680 @default.
- W2022182354 hasConcept C19067145 @default.
- W2022182354 hasConcept C191897082 @default.
- W2022182354 hasConcept C192562407 @default.
- W2022182354 hasConcept C22423302 @default.
- W2022182354 hasConcept C2780547777 @default.
- W2022182354 hasConcept C2780839960 @default.
- W2022182354 hasConcept C43617362 @default.
- W2022182354 hasConcept C544956773 @default.
- W2022182354 hasConcept C61427134 @default.
- W2022182354 hasConcept C77176794 @default.
- W2022182354 hasConceptScore W2022182354C113196181 @default.
- W2022182354 hasConceptScore W2022182354C144082473 @default.
- W2022182354 hasConceptScore W2022182354C145148216 @default.
- W2022182354 hasConceptScore W2022182354C147789679 @default.
- W2022182354 hasConceptScore W2022182354C162356407 @default.
- W2022182354 hasConceptScore W2022182354C171250308 @default.
- W2022182354 hasConceptScore W2022182354C177322064 @default.
- W2022182354 hasConceptScore W2022182354C178790620 @default.
- W2022182354 hasConceptScore W2022182354C185592680 @default.
- W2022182354 hasConceptScore W2022182354C19067145 @default.
- W2022182354 hasConceptScore W2022182354C191897082 @default.
- W2022182354 hasConceptScore W2022182354C192562407 @default.
- W2022182354 hasConceptScore W2022182354C22423302 @default.
- W2022182354 hasConceptScore W2022182354C2780547777 @default.
- W2022182354 hasConceptScore W2022182354C2780839960 @default.
- W2022182354 hasConceptScore W2022182354C43617362 @default.
- W2022182354 hasConceptScore W2022182354C544956773 @default.
- W2022182354 hasConceptScore W2022182354C61427134 @default.
- W2022182354 hasConceptScore W2022182354C77176794 @default.
- W2022182354 hasIssue "1-2" @default.
- W2022182354 hasLocation W20221823541 @default.
- W2022182354 hasOpenAccess W2022182354 @default.
- W2022182354 hasPrimaryLocation W20221823541 @default.
- W2022182354 hasRelatedWork W1987320405 @default.
- W2022182354 hasRelatedWork W2057332713 @default.
- W2022182354 hasRelatedWork W2077106834 @default.
- W2022182354 hasRelatedWork W2087590773 @default.
- W2022182354 hasRelatedWork W2089743211 @default.
- W2022182354 hasRelatedWork W2094159952 @default.
- W2022182354 hasRelatedWork W2094388296 @default.
- W2022182354 hasRelatedWork W2132191647 @default.
- W2022182354 hasRelatedWork W2316948141 @default.
- W2022182354 hasRelatedWork W2890888068 @default.
- W2022182354 hasVolume "245" @default.
- W2022182354 isParatext "false" @default.
- W2022182354 isRetracted "false" @default.
- W2022182354 magId "2022182354" @default.
- W2022182354 workType "article" @default.