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• W2022186054 abstract "This paper reports a silicon microphone with a wide frequency range and high linearity and its novel fabrication process. The transducer has a monolithic structure and is simply fabricated from a bonded silicon wafer. A frequency range from 30 Hz to 20 kHz, which covers the audio frequency, and a total harmonic distortion less than 0.3% at a sound pressure level of 20 Pa (120 dBSPL) are obtained. The measured sensitivity of the transducer is −52 dBV/Pa (1 kHz), which is in good agreement with the calculated value." @default.
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• W2022186054 date "2007-04-01" @default.
• W2022186054 modified "2023-10-14" @default.
• W2022186054 title "Silicon microphone with wide frequency range and high linearity" @default.
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• W2022186054 doi "https://doi.org/10.1016/j.sna.2006.08.016" @default.
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