FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022193772> ?p ?o ?g. }

• W2022193772 endingPage "137" @default.
• W2022193772 startingPage "133" @default.
• W2022193772 abstract "Hydrogenated amorphous silicon carbide films have been deposited on Si substrates using tetramethylsilane and hydrogen gas mixtures by the RF plasma CVD (chemical vapor deposition) technique. In situ diagnosis of chemical bonding states on the substrates exposed to plasmas has been also performed by FT-IR (Fourier transform infrared) spectrophotometry technique. The influences of the substrate temperature and the effective self-bias potential of the powered electrode on the impurities of deposition have been investigated. It has been found that the impurities of the deposited films were decreased sufficiently by increasing the substrate temperature to 1073 K. It has been also shown that the impurities were decreased by decreasing the effective self-bias potential of the powered electrode." @default.
• W2022193772 created "2016-06-24" @default.
• W2022193772 creator A5007234200 @default.
• W2022193772 creator A5039699220 @default.
• W2022193772 creator A5047625485 @default.
• W2022193772 creator A5065904639 @default.
• W2022193772 creator A5081536340 @default.
• W2022193772 date "2005-01-01" @default.
• W2022193772 modified "2023-10-18" @default.
• W2022193772 title "Evaluation of the Characters of a-SiC:H Films Deposited by RF Plasma CVD Technique" @default.
• W2022193772 cites W2068555437 @default.
• W2022193772 cites W2071606652 @default.
• W2022193772 doi "https://doi.org/10.1541/ieejfms.125.133" @default.
• W2022193772 hasPublicationYear "2005" @default.
• W2022193772 type Work @default.
• W2022193772 sameAs 2022193772 @default.
• W2022193772 citedByCount "2" @default.
• W2022193772 countsByYear W20221937722014 @default.
• W2022193772 crossrefType "journal-article" @default.
• W2022193772 hasAuthorship W2022193772A5007234200 @default.
• W2022193772 hasAuthorship W2022193772A5039699220 @default.
• W2022193772 hasAuthorship W2022193772A5047625485 @default.
• W2022193772 hasAuthorship W2022193772A5065904639 @default.
• W2022193772 hasAuthorship W2022193772A5081536340 @default.
• W2022193772 hasBestOaLocation W20221937721 @default.
• W2022193772 hasConcept C111368507 @default.
• W2022193772 hasConcept C113196181 @default.
• W2022193772 hasConcept C121332964 @default.
• W2022193772 hasConcept C127313418 @default.
• W2022193772 hasConcept C127413603 @default.
• W2022193772 hasConcept C147789679 @default.
• W2022193772 hasConcept C151730666 @default.
• W2022193772 hasConcept C160892712 @default.
• W2022193772 hasConcept C17525397 @default.
• W2022193772 hasConcept C178790620 @default.
• W2022193772 hasConcept C185592680 @default.
• W2022193772 hasConcept C191897082 @default.
• W2022193772 hasConcept C192562407 @default.
• W2022193772 hasConcept C2776390347 @default.
• W2022193772 hasConcept C2777289219 @default.
• W2022193772 hasConcept C2778200147 @default.
• W2022193772 hasConcept C2779667780 @default.
• W2022193772 hasConcept C2780722187 @default.
• W2022193772 hasConcept C2816523 @default.
• W2022193772 hasConcept C38347018 @default.
• W2022193772 hasConcept C42360764 @default.
• W2022193772 hasConcept C43617362 @default.
• W2022193772 hasConcept C49040817 @default.
• W2022193772 hasConcept C544956773 @default.
• W2022193772 hasConcept C56052488 @default.
• W2022193772 hasConcept C57410435 @default.
• W2022193772 hasConcept C62520636 @default.
• W2022193772 hasConcept C64297162 @default.
• W2022193772 hasConcept C71987851 @default.
• W2022193772 hasConcept C82706917 @default.
• W2022193772 hasConcept C86803240 @default.
• W2022193772 hasConceptScore W2022193772C111368507 @default.
• W2022193772 hasConceptScore W2022193772C113196181 @default.
• W2022193772 hasConceptScore W2022193772C121332964 @default.
• W2022193772 hasConceptScore W2022193772C127313418 @default.
• W2022193772 hasConceptScore W2022193772C127413603 @default.
• W2022193772 hasConceptScore W2022193772C147789679 @default.
• W2022193772 hasConceptScore W2022193772C151730666 @default.
• W2022193772 hasConceptScore W2022193772C160892712 @default.
• W2022193772 hasConceptScore W2022193772C17525397 @default.
• W2022193772 hasConceptScore W2022193772C178790620 @default.
• W2022193772 hasConceptScore W2022193772C185592680 @default.
• W2022193772 hasConceptScore W2022193772C191897082 @default.
• W2022193772 hasConceptScore W2022193772C192562407 @default.
• W2022193772 hasConceptScore W2022193772C2776390347 @default.
• W2022193772 hasConceptScore W2022193772C2777289219 @default.
• W2022193772 hasConceptScore W2022193772C2778200147 @default.
• W2022193772 hasConceptScore W2022193772C2779667780 @default.
• W2022193772 hasConceptScore W2022193772C2780722187 @default.
• W2022193772 hasConceptScore W2022193772C2816523 @default.
• W2022193772 hasConceptScore W2022193772C38347018 @default.
• W2022193772 hasConceptScore W2022193772C42360764 @default.
• W2022193772 hasConceptScore W2022193772C43617362 @default.
• W2022193772 hasConceptScore W2022193772C49040817 @default.
• W2022193772 hasConceptScore W2022193772C544956773 @default.
• W2022193772 hasConceptScore W2022193772C56052488 @default.
• W2022193772 hasConceptScore W2022193772C57410435 @default.
• W2022193772 hasConceptScore W2022193772C62520636 @default.
• W2022193772 hasConceptScore W2022193772C64297162 @default.
• W2022193772 hasConceptScore W2022193772C71987851 @default.
• W2022193772 hasConceptScore W2022193772C82706917 @default.
• W2022193772 hasConceptScore W2022193772C86803240 @default.
• W2022193772 hasIssue "2" @default.
• W2022193772 hasLocation W20221937721 @default.
• W2022193772 hasOpenAccess W2022193772 @default.
• W2022193772 hasPrimaryLocation W20221937721 @default.
• W2022193772 hasRelatedWork W2039547870 @default.
• W2022193772 hasRelatedWork W2043843160 @default.
• W2022193772 hasRelatedWork W2059129255 @default.
• W2022193772 hasRelatedWork W2073805946 @default.
• W2022193772 hasRelatedWork W2078183599 @default.
• W2022193772 hasRelatedWork W2089633568 @default.
• W2022193772 hasRelatedWork W2100958990 @default.

• next