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- W2022197743 abstract "Abstract The nuclear resonance in the 16 O(α, α) 16 O elastic scattering reaction at 3.045 MeV has been used in concentration profile measurements of oxygen in thin-film structures. The concentration profile can be deduced from an energy scan of the incoming α-particles, thus shifting the resonance to different depths in the sample. The method has been applied to studies of the structures (a) an etched Si-surface, (b) Au evaporated on Si, and (c) a Au-Ge-Si structure. Evidence is presented for the presence of oxygen in the Au layer and in the Ge layer." @default.
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- W2022197743 date "1978-02-01" @default.
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- W2022197743 title "Oxygen distribution profiles in thin evaporated contacts on single crystal silicon" @default.
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- W2022197743 doi "https://doi.org/10.1016/0029-554x(78)90874-1" @default.
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