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- W2022229366 abstract "In this letter, we study Ta/parylene-F (PA–F) buried interfaces using x-ray photoelectron spectroscopy. We found that the Ta–F bond was formed at the Ta/PA–F interface after depositing a layer of thin Ta film (<50 Å). For the Ar+ or O2 plasma pretreated PA–F surface, in addition to the Ta–F bond, a Ta–C bond was observed at the buried interface after Ta metallization. The Ta–C bond may be responsible for the enhancement of Ta/PA–F adhesion." @default.
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- W2022229366 date "1998-04-13" @default.
- W2022229366 modified "2023-09-27" @default.
- W2022229366 title "Chemical interactions at Ta/fluorinated polymer buried interfaces" @default.
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