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- W2022231601 endingPage "122" @default.
- W2022231601 startingPage "115" @default.
- W2022231601 abstract "Abstract The density of polycrystalline InP particles on the surface of Si3N4 and SiO2 masks was studied systematically under substrate temperatures from 550 to 700°C and reactor pressures from 4 to 760 Torr. The experiments used TMI and PH3 as sources for InP. Results showed that the density of the particles deposited on both masks decreases as the temperature increases and the pressure decreases. The explanation of the temperature and pressure dependence of the particle density is that the nucleation frequency of InP depends on the supersaturation degree of effective P or In species on the surface of the masks." @default.
- W2022231601 created "2016-06-24" @default.
- W2022231601 creator A5043681033 @default.
- W2022231601 creator A5045684716 @default.
- W2022231601 creator A5060905555 @default.
- W2022231601 creator A5087576721 @default.
- W2022231601 date "1987-07-01" @default.
- W2022231601 modified "2023-09-23" @default.
- W2022231601 title "Deposition of InP particles on Si3N4 and SiO2 films by low pressure MOCVD" @default.
- W2022231601 cites W1965270910 @default.
- W2022231601 cites W1989755068 @default.
- W2022231601 cites W1997357532 @default.
- W2022231601 cites W2000735604 @default.
- W2022231601 cites W2007988701 @default.
- W2022231601 cites W2053511798 @default.
- W2022231601 cites W2067518008 @default.
- W2022231601 cites W2104399223 @default.
- W2022231601 cites W2167638116 @default.
- W2022231601 cites W2227745879 @default.
- W2022231601 doi "https://doi.org/10.1016/0022-0248(87)90117-5" @default.
- W2022231601 hasPublicationYear "1987" @default.
- W2022231601 type Work @default.
- W2022231601 sameAs 2022231601 @default.
- W2022231601 citedByCount "18" @default.
- W2022231601 countsByYear W20222316012015 @default.
- W2022231601 countsByYear W20222316012017 @default.
- W2022231601 countsByYear W20222316012019 @default.
- W2022231601 crossrefType "journal-article" @default.
- W2022231601 hasAuthorship W2022231601A5043681033 @default.
- W2022231601 hasAuthorship W2022231601A5045684716 @default.
- W2022231601 hasAuthorship W2022231601A5060905555 @default.
- W2022231601 hasAuthorship W2022231601A5087576721 @default.
- W2022231601 hasConcept C110738630 @default.
- W2022231601 hasConcept C127313418 @default.
- W2022231601 hasConcept C151730666 @default.
- W2022231601 hasConcept C171250308 @default.
- W2022231601 hasConcept C175665537 @default.
- W2022231601 hasConcept C185592680 @default.
- W2022231601 hasConcept C19067145 @default.
- W2022231601 hasConcept C192562407 @default.
- W2022231601 hasConcept C199289684 @default.
- W2022231601 hasConcept C2779227376 @default.
- W2022231601 hasConcept C2816523 @default.
- W2022231601 hasConcept C49040817 @default.
- W2022231601 hasConcept C57410435 @default.
- W2022231601 hasConcept C64297162 @default.
- W2022231601 hasConceptScore W2022231601C110738630 @default.
- W2022231601 hasConceptScore W2022231601C127313418 @default.
- W2022231601 hasConceptScore W2022231601C151730666 @default.
- W2022231601 hasConceptScore W2022231601C171250308 @default.
- W2022231601 hasConceptScore W2022231601C175665537 @default.
- W2022231601 hasConceptScore W2022231601C185592680 @default.
- W2022231601 hasConceptScore W2022231601C19067145 @default.
- W2022231601 hasConceptScore W2022231601C192562407 @default.
- W2022231601 hasConceptScore W2022231601C199289684 @default.
- W2022231601 hasConceptScore W2022231601C2779227376 @default.
- W2022231601 hasConceptScore W2022231601C2816523 @default.
- W2022231601 hasConceptScore W2022231601C49040817 @default.
- W2022231601 hasConceptScore W2022231601C57410435 @default.
- W2022231601 hasConceptScore W2022231601C64297162 @default.
- W2022231601 hasIssue "1" @default.
- W2022231601 hasLocation W20222316011 @default.
- W2022231601 hasOpenAccess W2022231601 @default.
- W2022231601 hasPrimaryLocation W20222316011 @default.
- W2022231601 hasRelatedWork W1967465319 @default.
- W2022231601 hasRelatedWork W1981496411 @default.
- W2022231601 hasRelatedWork W1985332188 @default.
- W2022231601 hasRelatedWork W2002397887 @default.
- W2022231601 hasRelatedWork W2025822006 @default.
- W2022231601 hasRelatedWork W2026270272 @default.
- W2022231601 hasRelatedWork W2061897979 @default.
- W2022231601 hasRelatedWork W2062329057 @default.
- W2022231601 hasRelatedWork W2160856925 @default.
- W2022231601 hasRelatedWork W4324328993 @default.
- W2022231601 hasVolume "84" @default.
- W2022231601 isParatext "false" @default.
- W2022231601 isRetracted "false" @default.
- W2022231601 magId "2022231601" @default.
- W2022231601 workType "article" @default.