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- W2022231872 abstract "We report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of <TEX>$3-5{mu}m$</TEX> and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a <TEX>$V_2O_5$</TEX>-based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as <TEX>$CH_4$</TEX>, <TEX>$CO_2$</TEX>, <TEX>$N_2O$</TEX> and CO in the spectral range of <TEX>$3-5{mu}m$</TEX>. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases." @default.
- W2022231872 created "2016-06-24" @default.
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- W2022231872 date "2012-11-30" @default.
- W2022231872 modified "2023-10-15" @default.
- W2022231872 title "A Multi-Channel Gas Sensor Using Fabry-Perot Interferometer-Based Infrared Spectrometer" @default.
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- W2022231872 doi "https://doi.org/10.5369/jsst.2012.21.6.402" @default.
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