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- W2022243721 abstract "Abstract The combination of prototyping with a subsequent replication process has long been the choice for time efficient and economic production schemes. We adopted this method and developed a new technology for the fabrication of three dimensional microstructures based on excimer laser ablation of acrylic polymers and direct inverse replication. Our replicas are made of an acrylic monomer blend cured with UV-photons and electrons. In order to protect the master copy and to secure a safe and non-destructive separation of master copy and replica, the master copy was homogeneously coated with a high content fluorine layer. This coating was applied employing an adjusted C6F14 plasma polymerization process, resulting in an even 5 nm to ≤2 μm thin anti-adhesion layer. In order to characterize the physical and chemical properties of the laser processed master copy and replicas, we employed SEM, XPS and optical profiling. The coating's surface smoothness was measured to be as low as 4 nm (rms-value) and the surface's fluorine atomic concentration could be raised up to 68.6%. We have been observing a constant chemical composition at the replica's and master copy's surface over a period of 20 replication cycles and, in addition, no increase in master copy's surface roughness. The results demonstrate that the utilized anti-adhesion layer serves as an enduring separation coating." @default.
- W2022243721 created "2016-06-24" @default.
- W2022243721 creator A5009364453 @default.
- W2022243721 creator A5011347141 @default.
- W2022243721 creator A5026731839 @default.
- W2022243721 creator A5080219140 @default.
- W2022243721 creator A5062454633 @default.
- W2022243721 date "1999-01-01" @default.
- W2022243721 modified "2023-09-27" @default.
- W2022243721 title "Polymer replication of 3D microstructures employing a high content fluorine separation layer" @default.
- W2022243721 cites W1989385094 @default.
- W2022243721 cites W2029204997 @default.
- W2022243721 cites W2038402942 @default.
- W2022243721 cites W2047931292 @default.
- W2022243721 cites W2057337169 @default.
- W2022243721 doi "https://doi.org/10.1016/s0169-4332(98)00422-x" @default.
- W2022243721 hasPublicationYear "1999" @default.
- W2022243721 type Work @default.
- W2022243721 sameAs 2022243721 @default.
- W2022243721 citedByCount "4" @default.
- W2022243721 crossrefType "journal-article" @default.
- W2022243721 hasAuthorship W2022243721A5009364453 @default.
- W2022243721 hasAuthorship W2022243721A5011347141 @default.
- W2022243721 hasAuthorship W2022243721A5026731839 @default.
- W2022243721 hasAuthorship W2022243721A5062454633 @default.
- W2022243721 hasAuthorship W2022243721A5080219140 @default.
- W2022243721 hasConcept C107365816 @default.
- W2022243721 hasConcept C127413603 @default.
- W2022243721 hasConcept C142362112 @default.
- W2022243721 hasConcept C153349607 @default.
- W2022243721 hasConcept C159985019 @default.
- W2022243721 hasConcept C175708663 @default.
- W2022243721 hasConcept C191897082 @default.
- W2022243721 hasConcept C192562407 @default.
- W2022243721 hasConcept C2775937380 @default.
- W2022243721 hasConcept C2781448156 @default.
- W2022243721 hasConcept C42360764 @default.
- W2022243721 hasConcept C506198293 @default.
- W2022243721 hasConcept C521977710 @default.
- W2022243721 hasConcept C87976508 @default.
- W2022243721 hasConceptScore W2022243721C107365816 @default.
- W2022243721 hasConceptScore W2022243721C127413603 @default.
- W2022243721 hasConceptScore W2022243721C142362112 @default.
- W2022243721 hasConceptScore W2022243721C153349607 @default.
- W2022243721 hasConceptScore W2022243721C159985019 @default.
- W2022243721 hasConceptScore W2022243721C175708663 @default.
- W2022243721 hasConceptScore W2022243721C191897082 @default.
- W2022243721 hasConceptScore W2022243721C192562407 @default.
- W2022243721 hasConceptScore W2022243721C2775937380 @default.
- W2022243721 hasConceptScore W2022243721C2781448156 @default.
- W2022243721 hasConceptScore W2022243721C42360764 @default.
- W2022243721 hasConceptScore W2022243721C506198293 @default.
- W2022243721 hasConceptScore W2022243721C521977710 @default.
- W2022243721 hasConceptScore W2022243721C87976508 @default.
- W2022243721 hasLocation W20222437211 @default.
- W2022243721 hasOpenAccess W2022243721 @default.
- W2022243721 hasPrimaryLocation W20222437211 @default.
- W2022243721 hasRelatedWork W2048317679 @default.
- W2022243721 hasRelatedWork W2057149175 @default.
- W2022243721 hasRelatedWork W2063970416 @default.
- W2022243721 hasRelatedWork W1023198207 @default.
- W2022243721 hasRelatedWork W1483689836 @default.
- W2022243721 hasRelatedWork W1487651227 @default.
- W2022243721 hasRelatedWork W1499761622 @default.
- W2022243721 hasRelatedWork W1502709607 @default.
- W2022243721 hasRelatedWork W1503790627 @default.
- W2022243721 hasRelatedWork W1521640066 @default.
- W2022243721 hasRelatedWork W1532642330 @default.
- W2022243721 hasRelatedWork W1543536513 @default.
- W2022243721 hasRelatedWork W1546839231 @default.
- W2022243721 hasRelatedWork W1556848605 @default.
- W2022243721 hasRelatedWork W1559063998 @default.
- W2022243721 hasRelatedWork W1561466425 @default.
- W2022243721 hasRelatedWork W254109116 @default.
- W2022243721 hasRelatedWork W81233446 @default.
- W2022243721 hasRelatedWork W87760858 @default.
- W2022243721 hasRelatedWork W93143225 @default.
- W2022243721 isParatext "false" @default.
- W2022243721 isRetracted "false" @default.
- W2022243721 magId "2022243721" @default.
- W2022243721 workType "article" @default.