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• W2022244571 endingPage "12" @default.
• W2022244571 startingPage "9" @default.
• W2022244571 abstract "Hydrogen sensor working at room and 40degC temperatures made of porous silicon covered by the TiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2-x</sub> or ZnO(Al) thin film was realized. Porous silicon layer was formed by electrochemical anodization on a p- and n-type Si surface. Thereafter, n-type TiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2-x</sub> and ZnO(Al) thin films were deposited onto the porous silicon surface by electron-beam evaporation and magnetron sputtering, respectively. Platinum catalytic layer and Au electric contacts were for further measurements deposited onto obtained structures by ion-beam sputtering. The sensitivity of manufactured structures to 1000-5000 ppm of hydrogen, propane-butane mixture, and humidity was studied. Sensitivity of obtained structures was determined as ratio of the resistivity of structures in the presence of investigated gas to that in air. Results of sensitivity measurements showed that it is possible to realize a hydrogen nanosensor, resistivity of which can be decreased up to 2.5 times at room temperature and four times at 40degC for the Pt/TiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2-x</sub> /PS structure, as well as two times for the Pt/ZnO(Al)/PS structure at 40degC at 5000 ppm hydrogen concentration, respectively. Both structures have the recovery and response time of approximately 20 s and rather high durability and selectivity to hydrogen gas." @default.
• W2022244571 created "2016-06-24" @default.
• W2022244571 creator A5003712860 @default.
• W2022244571 creator A5005447433 @default.
• W2022244571 creator A5020682503 @default.
• W2022244571 creator A5024564166 @default.
• W2022244571 creator A5085271279 @default.
• W2022244571 date "2009-01-01" @default.
• W2022244571 modified "2023-10-01" @default.
• W2022244571 title "Hydrogen Sensor Made of Porous Silicon and Covered by TiO$_{2-{rm x}}$ or ZnO$langle$Al$rangle$ Thin Film" @default.
• W2022244571 cites W1972307729 @default.
• W2022244571 cites W1995634138 @default.
• W2022244571 cites W2003845381 @default.
• W2022244571 cites W2015379708 @default.
• W2022244571 cites W2016730429 @default.
• W2022244571 cites W2018843549 @default.
• W2022244571 cites W2025933302 @default.
• W2022244571 cites W2031238742 @default.
• W2022244571 cites W2066551461 @default.
• W2022244571 cites W2138072325 @default.
• W2022244571 cites W2139544306 @default.
• W2022244571 cites W2149728832 @default.
• W2022244571 cites W2166800886 @default.
• W2022244571 cites W4244039295 @default.
• W2022244571 doi "https://doi.org/10.1109/jsen.2008.2008406" @default.
• W2022244571 hasPublicationYear "2009" @default.
• W2022244571 type Work @default.
• W2022244571 sameAs 2022244571 @default.
• W2022244571 citedByCount "24" @default.
• W2022244571 countsByYear W20222445712012 @default.
• W2022244571 countsByYear W20222445712013 @default.
• W2022244571 countsByYear W20222445712014 @default.
• W2022244571 countsByYear W20222445712015 @default.
• W2022244571 countsByYear W20222445712016 @default.
• W2022244571 countsByYear W20222445712017 @default.
• W2022244571 countsByYear W20222445712018 @default.
• W2022244571 countsByYear W20222445712019 @default.
• W2022244571 countsByYear W20222445712020 @default.
• W2022244571 countsByYear W20222445712022 @default.
• W2022244571 crossrefType "journal-article" @default.
• W2022244571 hasAuthorship W2022244571A5003712860 @default.
• W2022244571 hasAuthorship W2022244571A5005447433 @default.
• W2022244571 hasAuthorship W2022244571A5020682503 @default.
• W2022244571 hasAuthorship W2022244571A5024564166 @default.
• W2022244571 hasAuthorship W2022244571A5085271279 @default.
• W2022244571 hasConcept C113196181 @default.
• W2022244571 hasConcept C159985019 @default.
• W2022244571 hasConcept C161790260 @default.
• W2022244571 hasConcept C171250308 @default.
• W2022244571 hasConcept C178790620 @default.
• W2022244571 hasConcept C185592680 @default.
• W2022244571 hasConcept C19067145 @default.
• W2022244571 hasConcept C192562407 @default.
• W2022244571 hasConcept C22016385 @default.
• W2022244571 hasConcept C22423302 @default.
• W2022244571 hasConcept C2776685891 @default.
• W2022244571 hasConcept C2778717364 @default.
• W2022244571 hasConcept C30262120 @default.
• W2022244571 hasConcept C49040817 @default.
• W2022244571 hasConcept C502130503 @default.
• W2022244571 hasConcept C512968161 @default.
• W2022244571 hasConcept C513153333 @default.
• W2022244571 hasConcept C544956773 @default.
• W2022244571 hasConcept C61427134 @default.
• W2022244571 hasConceptScore W2022244571C113196181 @default.
• W2022244571 hasConceptScore W2022244571C159985019 @default.
• W2022244571 hasConceptScore W2022244571C161790260 @default.
• W2022244571 hasConceptScore W2022244571C171250308 @default.
• W2022244571 hasConceptScore W2022244571C178790620 @default.
• W2022244571 hasConceptScore W2022244571C185592680 @default.
• W2022244571 hasConceptScore W2022244571C19067145 @default.
• W2022244571 hasConceptScore W2022244571C192562407 @default.
• W2022244571 hasConceptScore W2022244571C22016385 @default.
• W2022244571 hasConceptScore W2022244571C22423302 @default.
• W2022244571 hasConceptScore W2022244571C2776685891 @default.
• W2022244571 hasConceptScore W2022244571C2778717364 @default.
• W2022244571 hasConceptScore W2022244571C30262120 @default.
• W2022244571 hasConceptScore W2022244571C49040817 @default.
• W2022244571 hasConceptScore W2022244571C502130503 @default.
• W2022244571 hasConceptScore W2022244571C512968161 @default.
• W2022244571 hasConceptScore W2022244571C513153333 @default.
• W2022244571 hasConceptScore W2022244571C544956773 @default.
• W2022244571 hasConceptScore W2022244571C61427134 @default.
• W2022244571 hasIssue "1" @default.
• W2022244571 hasLocation W20222445711 @default.
• W2022244571 hasOpenAccess W2022244571 @default.
• W2022244571 hasPrimaryLocation W20222445711 @default.
• W2022244571 hasRelatedWork W1868807290 @default.
• W2022244571 hasRelatedWork W1987483996 @default.
• W2022244571 hasRelatedWork W2004485938 @default.
• W2022244571 hasRelatedWork W2014491887 @default.
• W2022244571 hasRelatedWork W2081185821 @default.
• W2022244571 hasRelatedWork W2091282684 @default.
• W2022244571 hasRelatedWork W2169943687 @default.
• W2022244571 hasRelatedWork W2216150479 @default.
• W2022244571 hasRelatedWork W2319675318 @default.
• W2022244571 hasRelatedWork W3021953758 @default.
• W2022244571 hasVolume "9" @default.

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