FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022256089> ?p ?o ?g. }

• W2022256089 abstract "CH 4 and C2H2 molecules (and their interconversion) in hydrocarbon/rare gas/H2 gas mixtures in a microwave reactor used for plasma enhanced diamond chemical vapor deposition (CVD) have been investigated by line-of-sight infrared absorption spectroscopy in the wavenumber range of 1276.5−1273.1 cm−1 using a quantum cascade laser spectrometer. Parameters explored include process conditions [pressure, input power, source hydrocarbon, rare gas (Ar or Ne), input gas mixing ratio], height (z) above the substrate, and time (t) after addition of hydrocarbon to a pre-existing Ar/H2 plasma. The line integrated absorptions so obtained have been converted to species number densities by reference to the companion two-dimensional (r,z) modeling of the CVD reactor described in Mankelevich et al. [J. Appl. Phys. 104, 113304 (2008)]. The gas temperature distribution within the reactor ensures that the measured absorptions are dominated by CH4 and C2H2 molecules in the cool periphery of the reactor. Nonetheless, the measurements prove to be of enormous value in testing, tensioning, and confirming the model predictions. Under standard process conditions, the study confirms that all hydrocarbon source gases investigated (methane, acetylene, ethane, propyne, propane, and butane) are converted into a mixture dominated by CH4 and C2H2. The interconversion between these two species is highly dependent on the local gas temperature and the H atom number density, and thus on position within the reactor. CH4→C2H2 conversion occurs most efficiently in an annular shell around the central plasma (characterized by 1400&lt;Tgas&lt;2200 K), while the reverse transformation C2H2→CH4 is favored in the more distant regions where Tgas&lt;1400 K. Analysis of the multistep interconversion mechanism reveals substantial net consumption of H atoms accompanying the CH4→C2H2 conversion, whereas the reverse C2H2→CH4 process only requires H atoms to drive the reactions; H atoms are not consumed by the overall conversion." @default.
• W2022256089 created "2016-06-24" @default.
• W2022256089 creator A5013376926 @default.
• W2022256089 creator A5019743038 @default.
• W2022256089 creator A5022005831 @default.
• W2022256089 creator A5033868405 @default.
• W2022256089 creator A5043529461 @default.
• W2022256089 creator A5050246191 @default.
• W2022256089 creator A5061874643 @default.
• W2022256089 creator A5088999737 @default.
• W2022256089 date "2009-08-01" @default.
• W2022256089 modified "2023-09-25" @default.
• W2022256089 title "Quantum cascade laser investigations of CH4 and C2H2 interconversion in hydrocarbon/H2 gas mixtures during microwave plasma enhanced chemical vapor deposition of diamond" @default.
• W2022256089 cites W1603698558 @default.
• W2022256089 cites W1665478371 @default.
• W2022256089 cites W1963524333 @default.
• W2022256089 cites W1971540314 @default.
• W2022256089 cites W2016540130 @default.
• W2022256089 cites W2022028647 @default.
• W2022256089 cites W2022341474 @default.
• W2022256089 cites W2036267434 @default.
• W2022256089 cites W2050108029 @default.
• W2022256089 cites W2060719349 @default.
• W2022256089 cites W2061961086 @default.
• W2022256089 cites W2074502311 @default.
• W2022256089 cites W2092058632 @default.
• W2022256089 cites W2092417130 @default.
• W2022256089 cites W2097821328 @default.
• W2022256089 cites W2112684608 @default.
• W2022256089 cites W2140361452 @default.
• W2022256089 cites W2140695896 @default.
• W2022256089 cites W2164250843 @default.
• W2022256089 cites W2164313343 @default.
• W2022256089 cites W2174139251 @default.
• W2022256089 cites W2330650202 @default.
• W2022256089 cites W4213168521 @default.
• W2022256089 doi "https://doi.org/10.1063/1.3176971" @default.
• W2022256089 hasPublicationYear "2009" @default.
• W2022256089 type Work @default.
• W2022256089 sameAs 2022256089 @default.
• W2022256089 citedByCount "33" @default.
• W2022256089 countsByYear W20222560892012 @default.
• W2022256089 countsByYear W20222560892014 @default.
• W2022256089 countsByYear W20222560892015 @default.
• W2022256089 countsByYear W20222560892016 @default.
• W2022256089 countsByYear W20222560892017 @default.
• W2022256089 countsByYear W20222560892018 @default.
• W2022256089 countsByYear W20222560892019 @default.
• W2022256089 countsByYear W20222560892020 @default.
• W2022256089 countsByYear W20222560892022 @default.
• W2022256089 countsByYear W20222560892023 @default.
• W2022256089 crossrefType "journal-article" @default.
• W2022256089 hasAuthorship W2022256089A5013376926 @default.
• W2022256089 hasAuthorship W2022256089A5019743038 @default.
• W2022256089 hasAuthorship W2022256089A5022005831 @default.
• W2022256089 hasAuthorship W2022256089A5033868405 @default.
• W2022256089 hasAuthorship W2022256089A5043529461 @default.
• W2022256089 hasAuthorship W2022256089A5050246191 @default.
• W2022256089 hasAuthorship W2022256089A5061874643 @default.
• W2022256089 hasAuthorship W2022256089A5088999737 @default.
• W2022256089 hasConcept C113196181 @default.
• W2022256089 hasConcept C161790260 @default.
• W2022256089 hasConcept C178790620 @default.
• W2022256089 hasConcept C185592680 @default.
• W2022256089 hasConcept C2776345496 @default.
• W2022256089 hasConcept C2777197226 @default.
• W2022256089 hasConcept C2777207669 @default.
• W2022256089 hasConcept C2777517455 @default.
• W2022256089 hasConcept C2778717364 @default.
• W2022256089 hasConcept C516920438 @default.
• W2022256089 hasConcept C57410435 @default.
• W2022256089 hasConceptScore W2022256089C113196181 @default.
• W2022256089 hasConceptScore W2022256089C161790260 @default.
• W2022256089 hasConceptScore W2022256089C178790620 @default.
• W2022256089 hasConceptScore W2022256089C185592680 @default.
• W2022256089 hasConceptScore W2022256089C2776345496 @default.
• W2022256089 hasConceptScore W2022256089C2777197226 @default.
• W2022256089 hasConceptScore W2022256089C2777207669 @default.
• W2022256089 hasConceptScore W2022256089C2777517455 @default.
• W2022256089 hasConceptScore W2022256089C2778717364 @default.
• W2022256089 hasConceptScore W2022256089C516920438 @default.
• W2022256089 hasConceptScore W2022256089C57410435 @default.
• W2022256089 hasIssue "3" @default.
• W2022256089 hasLocation W20222560891 @default.
• W2022256089 hasOpenAccess W2022256089 @default.
• W2022256089 hasPrimaryLocation W20222560891 @default.
• W2022256089 hasRelatedWork W2068712424 @default.
• W2022256089 hasRelatedWork W2077773780 @default.
• W2022256089 hasRelatedWork W2094109820 @default.
• W2022256089 hasRelatedWork W2133025452 @default.
• W2022256089 hasRelatedWork W2147813395 @default.
• W2022256089 hasRelatedWork W2188409405 @default.
• W2022256089 hasRelatedWork W2228679353 @default.
• W2022256089 hasRelatedWork W2761160490 @default.
• W2022256089 hasRelatedWork W2917840476 @default.
• W2022256089 hasRelatedWork W2951593747 @default.
• W2022256089 hasVolume "106" @default.
• W2022256089 isParatext "false" @default.
• W2022256089 isRetracted "false" @default.
• W2022256089 magId "2022256089" @default.

• next