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• W2022271683 endingPage "1058" @default.
• W2022271683 startingPage "1052" @default.
• W2022271683 abstract "• Excimer laser irradiation of transparent conductive oxides was monitored in situ . • Numerical simulations of different films verify the importance of this monitoring. • A near-infrared sensor detected thermal emission signals on a nanosecond timescale. • Useful for developing a low-temperature fabrication process of transparent conductive oxides. In this paper, in situ monitoring of excimer laser irradiation processing is examined for application to the production of thin films of transparent conductive oxides (TCOs) such as tin-doped indium oxide (ITO). Numerical simulations reveal that differences in the thin film state, for example, in the dopant levels, could greatly affect the proper laser fluence, suggesting the importance of in situ monitoring of the excimer laser processing. The thermal emission signals of ITO thin films under irradiation by a pulsed ultraviolet laser were successfully detected in situ with a near-infrared sensor on a nanosecond timescale. Non-monotonic decay of the thermal radiation from the ITO thin films was observed under XeCl laser irradiation above a certain fluence. At this fluence, the surface morphology of the ITO thin films observed by atomic force microscopy changed to a microstructure reflecting melting and solidification. This correspondence between the thermal radiation and morphology suggests that the observed non-monotonic decay was caused by recalescence upon solidification and that the in situ monitoring technique can be used to detect such phase changes." @default.
• W2022271683 created "2016-06-24" @default.
• W2022271683 creator A5048244785 @default.
• W2022271683 creator A5049169785 @default.
• W2022271683 creator A5089961043 @default.
• W2022271683 date "2014-02-01" @default.
• W2022271683 modified "2023-09-24" @default.
• W2022271683 title "In situ monitoring of excimer laser annealing of tin-doped indium oxide films for the development of a low-temperature fabrication process" @default.
• W2022271683 cites W1969142912 @default.
• W2022271683 cites W1977257505 @default.
• W2022271683 cites W1977347179 @default.
• W2022271683 cites W1988129185 @default.
• W2022271683 cites W1989176753 @default.
• W2022271683 cites W1995288250 @default.
• W2022271683 cites W2001601710 @default.
• W2022271683 cites W2004108551 @default.
• W2022271683 cites W2005016921 @default.
• W2022271683 cites W2013957553 @default.
• W2022271683 cites W2024829198 @default.
• W2022271683 cites W2027569311 @default.
• W2022271683 cites W2027771267 @default.
• W2022271683 cites W2031009066 @default.
• W2022271683 cites W2044381321 @default.
• W2022271683 cites W2044562203 @default.
• W2022271683 cites W2045856877 @default.
• W2022271683 cites W2047696743 @default.
• W2022271683 cites W2048479530 @default.
• W2022271683 cites W2051793288 @default.
• W2022271683 cites W2059524930 @default.
• W2022271683 cites W2061887256 @default.
• W2022271683 cites W2062618035 @default.
• W2022271683 cites W2090802922 @default.
• W2022271683 cites W2093322831 @default.
• W2022271683 cites W2105146432 @default.
• W2022271683 cites W2107833993 @default.
• W2022271683 cites W4235523001 @default.
• W2022271683 cites W2072729450 @default.
• W2022271683 doi "https://doi.org/10.1016/j.apsusc.2013.12.101" @default.
• W2022271683 hasPublicationYear "2014" @default.
• W2022271683 type Work @default.
• W2022271683 sameAs 2022271683 @default.
• W2022271683 citedByCount "13" @default.
• W2022271683 countsByYear W20222716832014 @default.
• W2022271683 countsByYear W20222716832015 @default.
• W2022271683 countsByYear W20222716832016 @default.
• W2022271683 countsByYear W20222716832017 @default.
• W2022271683 countsByYear W20222716832018 @default.
• W2022271683 countsByYear W20222716832020 @default.
• W2022271683 countsByYear W20222716832021 @default.
• W2022271683 countsByYear W20222716832023 @default.
• W2022271683 crossrefType "journal-article" @default.
• W2022271683 hasAuthorship W2022271683A5048244785 @default.
• W2022271683 hasAuthorship W2022271683A5049169785 @default.
• W2022271683 hasAuthorship W2022271683A5089961043 @default.
• W2022271683 hasConcept C111337013 @default.
• W2022271683 hasConcept C120665830 @default.
• W2022271683 hasConcept C121332964 @default.
• W2022271683 hasConcept C159985019 @default.
• W2022271683 hasConcept C171250308 @default.
• W2022271683 hasConcept C185544564 @default.
• W2022271683 hasConcept C19067145 @default.
• W2022271683 hasConcept C192562407 @default.
• W2022271683 hasConcept C22078206 @default.
• W2022271683 hasConcept C2777855556 @default.
• W2022271683 hasConcept C2780477314 @default.
• W2022271683 hasConcept C32737372 @default.
• W2022271683 hasConcept C37982897 @default.
• W2022271683 hasConcept C49040817 @default.
• W2022271683 hasConcept C51141536 @default.
• W2022271683 hasConcept C520434653 @default.
• W2022271683 hasConcept C543292547 @default.
• W2022271683 hasConceptScore W2022271683C111337013 @default.
• W2022271683 hasConceptScore W2022271683C120665830 @default.
• W2022271683 hasConceptScore W2022271683C121332964 @default.
• W2022271683 hasConceptScore W2022271683C159985019 @default.
• W2022271683 hasConceptScore W2022271683C171250308 @default.
• W2022271683 hasConceptScore W2022271683C185544564 @default.
• W2022271683 hasConceptScore W2022271683C19067145 @default.
• W2022271683 hasConceptScore W2022271683C192562407 @default.
• W2022271683 hasConceptScore W2022271683C22078206 @default.
• W2022271683 hasConceptScore W2022271683C2777855556 @default.
• W2022271683 hasConceptScore W2022271683C2780477314 @default.
• W2022271683 hasConceptScore W2022271683C32737372 @default.
• W2022271683 hasConceptScore W2022271683C37982897 @default.
• W2022271683 hasConceptScore W2022271683C49040817 @default.
• W2022271683 hasConceptScore W2022271683C51141536 @default.
• W2022271683 hasConceptScore W2022271683C520434653 @default.
• W2022271683 hasConceptScore W2022271683C543292547 @default.
• W2022271683 hasLocation W20222716831 @default.
• W2022271683 hasOpenAccess W2022271683 @default.
• W2022271683 hasPrimaryLocation W20222716831 @default.
• W2022271683 hasRelatedWork W1998335983 @default.
• W2022271683 hasRelatedWork W2003108915 @default.
• W2022271683 hasRelatedWork W2003370658 @default.
• W2022271683 hasRelatedWork W2013380538 @default.
• W2022271683 hasRelatedWork W2037565715 @default.
• W2022271683 hasRelatedWork W2050143386 @default.
• W2022271683 hasRelatedWork W2063352620 @default.

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