FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022328956> ?p ?o ?g. }

• W2022328956 endingPage "16260" @default.
• W2022328956 startingPage "16257" @default.
• W2022328956 abstract "Silicate-silsesquioxane or siloxane-silsesquioxane hybrid thin films are strong candidates as matrix materials for ultralow dielectric constant (low-k) thin films. We synthesized the silicate-silsesquioxane hybrid resins from tetraethoxyorthosilicate (TEOS) and methyltrimethoxysilane (MTMS) through hydrolysis and condensation polymerization by changing their molar ratios ([TEOS]−[MTMS] = 7:3, 5:5, and 3:7), spin-coating on Si(100) wafers. In the case of [TEOS]−[MTMS] = 7:3, the dielectric permittivity value of the resultant thin film was measured at 4.30, exceeding that of the thermal oxide (3.9). This high value was thought to be due to Si-OH groups inside the film and more extensive studies were preformed in terms of electronic, ionic, and orientational polarizations using Debye equation. The relationship between the mechanical properties and the synthetic conditions of the silicate-silsesquioxane precursors was also investigated. The synthetic conditions of the low-k films have to be chosen to meet both the low orientational polarization and high mechanical properties requirements." @default.
• W2022328956 created "2016-06-24" @default.
• W2022328956 creator A5058882415 @default.
• W2022328956 creator A5066183766 @default.
• W2022328956 date "2008-11-24" @default.
• W2022328956 modified "2023-10-18" @default.
• W2022328956 title "What Originates the Dielectric Permittivity of Silicate-Silsesquioxane Hybrid Thin Films?" @default.
• W2022328956 cites W1972498938 @default.
• W2022328956 cites W2004215374 @default.
• W2022328956 cites W2011745600 @default.
• W2022328956 cites W2012485645 @default.
• W2022328956 cites W2031161995 @default.
• W2022328956 cites W2039506369 @default.
• W2022328956 cites W2054612404 @default.
• W2022328956 cites W2058615916 @default.
• W2022328956 cites W2068730598 @default.
• W2022328956 cites W2076993873 @default.
• W2022328956 cites W2088886837 @default.
• W2022328956 cites W2095969847 @default.
• W2022328956 cites W2147587132 @default.
• W2022328956 cites W2166354192 @default.
• W2022328956 cites W626854176 @default.
• W2022328956 doi "https://doi.org/10.1021/jp808529q" @default.
• W2022328956 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/19367809" @default.
• W2022328956 hasPublicationYear "2008" @default.
• W2022328956 type Work @default.
• W2022328956 sameAs 2022328956 @default.
• W2022328956 citedByCount "17" @default.
• W2022328956 countsByYear W20223289562012 @default.
• W2022328956 countsByYear W20223289562013 @default.
• W2022328956 countsByYear W20223289562015 @default.
• W2022328956 countsByYear W20223289562016 @default.
• W2022328956 countsByYear W20223289562017 @default.
• W2022328956 countsByYear W20223289562018 @default.
• W2022328956 crossrefType "journal-article" @default.
• W2022328956 hasAuthorship W2022328956A5058882415 @default.
• W2022328956 hasAuthorship W2022328956A5066183766 @default.
• W2022328956 hasConcept C127413603 @default.
• W2022328956 hasConcept C133386390 @default.
• W2022328956 hasConcept C159985019 @default.
• W2022328956 hasConcept C161790260 @default.
• W2022328956 hasConcept C168651791 @default.
• W2022328956 hasConcept C171250308 @default.
• W2022328956 hasConcept C178790620 @default.
• W2022328956 hasConcept C18293161 @default.
• W2022328956 hasConcept C185592680 @default.
• W2022328956 hasConcept C188027245 @default.
• W2022328956 hasConcept C19067145 @default.
• W2022328956 hasConcept C192562407 @default.
• W2022328956 hasConcept C2776139660 @default.
• W2022328956 hasConcept C2777335606 @default.
• W2022328956 hasConcept C2777581007 @default.
• W2022328956 hasConcept C2779063765 @default.
• W2022328956 hasConcept C2779723377 @default.
• W2022328956 hasConcept C2781448156 @default.
• W2022328956 hasConcept C38398224 @default.
• W2022328956 hasConcept C42360764 @default.
• W2022328956 hasConcept C49040817 @default.
• W2022328956 hasConcept C521977710 @default.
• W2022328956 hasConceptScore W2022328956C127413603 @default.
• W2022328956 hasConceptScore W2022328956C133386390 @default.
• W2022328956 hasConceptScore W2022328956C159985019 @default.
• W2022328956 hasConceptScore W2022328956C161790260 @default.
• W2022328956 hasConceptScore W2022328956C168651791 @default.
• W2022328956 hasConceptScore W2022328956C171250308 @default.
• W2022328956 hasConceptScore W2022328956C178790620 @default.
• W2022328956 hasConceptScore W2022328956C18293161 @default.
• W2022328956 hasConceptScore W2022328956C185592680 @default.
• W2022328956 hasConceptScore W2022328956C188027245 @default.
• W2022328956 hasConceptScore W2022328956C19067145 @default.
• W2022328956 hasConceptScore W2022328956C192562407 @default.
• W2022328956 hasConceptScore W2022328956C2776139660 @default.
• W2022328956 hasConceptScore W2022328956C2777335606 @default.
• W2022328956 hasConceptScore W2022328956C2777581007 @default.
• W2022328956 hasConceptScore W2022328956C2779063765 @default.
• W2022328956 hasConceptScore W2022328956C2779723377 @default.
• W2022328956 hasConceptScore W2022328956C2781448156 @default.
• W2022328956 hasConceptScore W2022328956C38398224 @default.
• W2022328956 hasConceptScore W2022328956C42360764 @default.
• W2022328956 hasConceptScore W2022328956C49040817 @default.
• W2022328956 hasConceptScore W2022328956C521977710 @default.
• W2022328956 hasIssue "51" @default.
• W2022328956 hasLocation W20223289561 @default.
• W2022328956 hasLocation W20223289562 @default.
• W2022328956 hasOpenAccess W2022328956 @default.
• W2022328956 hasPrimaryLocation W20223289561 @default.
• W2022328956 hasRelatedWork W1447618055 @default.
• W2022328956 hasRelatedWork W1921606869 @default.
• W2022328956 hasRelatedWork W2022328956 @default.
• W2022328956 hasRelatedWork W2057733562 @default.
• W2022328956 hasRelatedWork W2267549599 @default.
• W2022328956 hasRelatedWork W2470448170 @default.
• W2022328956 hasRelatedWork W3131515790 @default.
• W2022328956 hasRelatedWork W3134602390 @default.
• W2022328956 hasRelatedWork W3138870499 @default.
• W2022328956 hasRelatedWork W4312628314 @default.
• W2022328956 hasVolume "112" @default.
• W2022328956 isParatext "false" @default.

• next