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• W2022331525 endingPage "14467" @default.
• W2022331525 startingPage "14467" @default.
• W2022331525 abstract "We have realized the first demonstration of a table-top aerial imaging microscope capable of characterizing pattern and defect printability in extreme ultraviolet lithography masks. The microscope combines the output of a 13.2 nm wavelength, table-top, plasma-based, EUV laser with zone plate optics to mimic the imaging conditions of an EUV lithographic stepper. We have characterized the illumination of the system and performed line-edge roughness measurements on an EUVL mask. The results open a path for the development of a compact aerial imaging microscope for high-volume manufacturing." @default.
• W2022331525 created "2016-06-24" @default.
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• W2022331525 date "2010-06-22" @default.
• W2022331525 modified "2023-09-27" @default.
• W2022331525 title "Extreme ultraviolet laser-based table-top aerial image metrology of lithographic masks" @default.
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• W2022331525 doi "https://doi.org/10.1364/oe.18.014467" @default.
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