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- W2022332732 abstract "A novel S/D junction technology for realising sub-0.1 µm NMOSFETs is proposed. In this technology, S/D extensions are formed using arsenic (As) diffusion from an As adsorbed atomic layer on the silicon surface by high temperature RTA. This method provides an extremely shallow extension (below 20 nm) with low sheet-resistance (below 2 kΩ/□), maintaining a low junction leakage. NMOSFETs fabricated using this technology show better suppression of the short channel effect compared to conventional FETs." @default.
- W2022332732 created "2016-06-24" @default.
- W2022332732 creator A5050596277 @default.
- W2022332732 creator A5053670695 @default.
- W2022332732 creator A5059487693 @default.
- W2022332732 creator A5072665795 @default.
- W2022332732 creator A5079318560 @default.
- W2022332732 creator A5090318603 @default.
- W2022332732 date "1999-01-01" @default.
- W2022332732 modified "2023-09-26" @default.
- W2022332732 title "Ultra-shallow junction technology by atomic layer doping from arsenic adsorbed layer" @default.
- W2022332732 doi "https://doi.org/10.1049/el:19990299" @default.
- W2022332732 hasPublicationYear "1999" @default.
- W2022332732 type Work @default.
- W2022332732 sameAs 2022332732 @default.
- W2022332732 citedByCount "4" @default.
- W2022332732 crossrefType "journal-article" @default.
- W2022332732 hasAuthorship W2022332732A5050596277 @default.
- W2022332732 hasAuthorship W2022332732A5053670695 @default.
- W2022332732 hasAuthorship W2022332732A5059487693 @default.
- W2022332732 hasAuthorship W2022332732A5072665795 @default.
- W2022332732 hasAuthorship W2022332732A5079318560 @default.
- W2022332732 hasAuthorship W2022332732A5090318603 @default.
- W2022332732 hasConcept C139719470 @default.
- W2022332732 hasConcept C147789679 @default.
- W2022332732 hasConcept C150394285 @default.
- W2022332732 hasConcept C162324750 @default.
- W2022332732 hasConcept C171250308 @default.
- W2022332732 hasConcept C185592680 @default.
- W2022332732 hasConcept C191897082 @default.
- W2022332732 hasConcept C192562407 @default.
- W2022332732 hasConcept C2777042071 @default.
- W2022332732 hasConcept C2779227376 @default.
- W2022332732 hasConcept C49040817 @default.
- W2022332732 hasConcept C502230775 @default.
- W2022332732 hasConcept C544956773 @default.
- W2022332732 hasConcept C57863236 @default.
- W2022332732 hasConcept C66825105 @default.
- W2022332732 hasConceptScore W2022332732C139719470 @default.
- W2022332732 hasConceptScore W2022332732C147789679 @default.
- W2022332732 hasConceptScore W2022332732C150394285 @default.
- W2022332732 hasConceptScore W2022332732C162324750 @default.
- W2022332732 hasConceptScore W2022332732C171250308 @default.
- W2022332732 hasConceptScore W2022332732C185592680 @default.
- W2022332732 hasConceptScore W2022332732C191897082 @default.
- W2022332732 hasConceptScore W2022332732C192562407 @default.
- W2022332732 hasConceptScore W2022332732C2777042071 @default.
- W2022332732 hasConceptScore W2022332732C2779227376 @default.
- W2022332732 hasConceptScore W2022332732C49040817 @default.
- W2022332732 hasConceptScore W2022332732C502230775 @default.
- W2022332732 hasConceptScore W2022332732C544956773 @default.
- W2022332732 hasConceptScore W2022332732C57863236 @default.
- W2022332732 hasConceptScore W2022332732C66825105 @default.
- W2022332732 hasLocation W20223327321 @default.
- W2022332732 hasOpenAccess W2022332732 @default.
- W2022332732 hasPrimaryLocation W20223327321 @default.
- W2022332732 hasRelatedWork W1507188102 @default.
- W2022332732 hasRelatedWork W1510097380 @default.
- W2022332732 hasRelatedWork W1964467390 @default.
- W2022332732 hasRelatedWork W1971149285 @default.
- W2022332732 hasRelatedWork W1973264048 @default.
- W2022332732 hasRelatedWork W1993193245 @default.
- W2022332732 hasRelatedWork W2019858749 @default.
- W2022332732 hasRelatedWork W2030128404 @default.
- W2022332732 hasRelatedWork W2034164736 @default.
- W2022332732 hasRelatedWork W2037480193 @default.
- W2022332732 hasRelatedWork W2038841909 @default.
- W2022332732 hasRelatedWork W2067215990 @default.
- W2022332732 hasRelatedWork W2086740617 @default.
- W2022332732 hasRelatedWork W2108485420 @default.
- W2022332732 hasRelatedWork W2128919271 @default.
- W2022332732 hasRelatedWork W2157133226 @default.
- W2022332732 hasRelatedWork W2535530981 @default.
- W2022332732 hasRelatedWork W2538118630 @default.
- W2022332732 hasRelatedWork W2545821028 @default.
- W2022332732 hasRelatedWork W2901393393 @default.
- W2022332732 isParatext "false" @default.
- W2022332732 isRetracted "false" @default.
- W2022332732 magId "2022332732" @default.
- W2022332732 workType "article" @default.