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- W2022338063 abstract "Calcium Fluoride microlens arrays have been produced with the help of an ion milling transfer of photoresist lenses which have been fabricated by two different techniques (i) by a melting resist technique and (ii) gray scale lithography. Major technical problems connected with the ion milling transfer of the photoresist lenses in the CaF<SUB>2</SUB> material are surface roughness enhancement and variation of the lens shape. We studied the ion-induced decomposition of CaF<SUB>2</SUB> and the surface roughness equatio in dependence on different milling conditions. For the microlens patter transfer the ratio of etching rates of the photoresist and the CaF<SUB>2</SUB> have been adjusted by gas admixture of nitrogen to the Ar sputtering gas. The angle dependence of the etching rates leads also to a changing of the lens profile. The effect of ion beam induced surface roughness and the accuracy of the transfer process is discussed." @default.
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- W2022338063 date "2000-08-18" @default.
- W2022338063 modified "2023-09-27" @default.
- W2022338063 title "<title>Fabrication of microlens arrays in CaF<formula><inf><roman>2</roman></inf></formula> by ion milling</title>" @default.
- W2022338063 doi "https://doi.org/10.1117/12.395680" @default.
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