Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022342783> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2022342783 abstract "Increased lithographic performance has been the key enabler for the continued reduction of minimum device feature sizes down to 0.25 micrometers and beyond. However, this increase in performance has been accompanied by the added fabrication complexity of the various types of lithographic reticles. In addition to having submicrometer sized features, advanced optical masks are three dimensional in nature with high aspect ratio features of different materials in close proximity to each other. Lithographic process latitude, which determines the ultimate feasibility of that process, is critically dependent upon the level of measurement and control of these mask features. Standard reference materials are needed in order to improve the accuracy of the mask measurements, but do not yet exist. To initiate progress in this area, a set of test reticles has been fabricated to serve as in-house calibration standards and to study various phenomena affecting three-dimensional submicron dimensional metrology for advanced optical masks. The first member of the set, known as the Lateral Resolution Tester (LRT), contains chromium features on unetched quartz (opaque and partially transparent) having linewidths as narrow as 200 nm. The PSM Feature Tester contains many types of phase-shifting mask patterns with varying lateral dimensions. The Herschel Tester contains various phase-shifting apertures of different depths and widths. All of the patterns and concepts used in the set have been brought together in order to produce a new PSM metrology test/calibration mask known as the PSM Round Robin Reticle (RRR). The types of patterns as well as the techniques used to measure them are presented. The RRR will also be used as the test vehicle for a round robin comparison of measurements taken with metrology tools at different mask shops and to determine optimum designs for future PSM metrology calibration standards." @default.
- W2022342783 created "2016-06-24" @default.
- W2022342783 creator A5037782950 @default.
- W2022342783 creator A5060468628 @default.
- W2022342783 creator A5069784396 @default.
- W2022342783 creator A5077945893 @default.
- W2022342783 creator A5080682884 @default.
- W2022342783 date "1994-12-07" @default.
- W2022342783 modified "2023-09-23" @default.
- W2022342783 title "<title>Metrology test reticles for advanced optical lithography</title>" @default.
- W2022342783 doi "https://doi.org/10.1117/12.195832" @default.
- W2022342783 hasPublicationYear "1994" @default.
- W2022342783 type Work @default.
- W2022342783 sameAs 2022342783 @default.
- W2022342783 citedByCount "0" @default.
- W2022342783 crossrefType "proceedings-article" @default.
- W2022342783 hasAuthorship W2022342783A5037782950 @default.
- W2022342783 hasAuthorship W2022342783A5060468628 @default.
- W2022342783 hasAuthorship W2022342783A5069784396 @default.
- W2022342783 hasAuthorship W2022342783A5077945893 @default.
- W2022342783 hasAuthorship W2022342783A5080682884 @default.
- W2022342783 hasConcept C105487726 @default.
- W2022342783 hasConcept C120665830 @default.
- W2022342783 hasConcept C121332964 @default.
- W2022342783 hasConcept C136525101 @default.
- W2022342783 hasConcept C138885662 @default.
- W2022342783 hasConcept C142724271 @default.
- W2022342783 hasConcept C146617872 @default.
- W2022342783 hasConcept C14737013 @default.
- W2022342783 hasConcept C160671074 @default.
- W2022342783 hasConcept C162996421 @default.
- W2022342783 hasConcept C165838908 @default.
- W2022342783 hasConcept C171250308 @default.
- W2022342783 hasConcept C192562407 @default.
- W2022342783 hasConcept C195766429 @default.
- W2022342783 hasConcept C204223013 @default.
- W2022342783 hasConcept C204787440 @default.
- W2022342783 hasConcept C2776401178 @default.
- W2022342783 hasConcept C2779227376 @default.
- W2022342783 hasConcept C41008148 @default.
- W2022342783 hasConcept C41895202 @default.
- W2022342783 hasConcept C49040817 @default.
- W2022342783 hasConcept C53524968 @default.
- W2022342783 hasConcept C62520636 @default.
- W2022342783 hasConcept C71924100 @default.
- W2022342783 hasConcept C78371743 @default.
- W2022342783 hasConceptScore W2022342783C105487726 @default.
- W2022342783 hasConceptScore W2022342783C120665830 @default.
- W2022342783 hasConceptScore W2022342783C121332964 @default.
- W2022342783 hasConceptScore W2022342783C136525101 @default.
- W2022342783 hasConceptScore W2022342783C138885662 @default.
- W2022342783 hasConceptScore W2022342783C142724271 @default.
- W2022342783 hasConceptScore W2022342783C146617872 @default.
- W2022342783 hasConceptScore W2022342783C14737013 @default.
- W2022342783 hasConceptScore W2022342783C160671074 @default.
- W2022342783 hasConceptScore W2022342783C162996421 @default.
- W2022342783 hasConceptScore W2022342783C165838908 @default.
- W2022342783 hasConceptScore W2022342783C171250308 @default.
- W2022342783 hasConceptScore W2022342783C192562407 @default.
- W2022342783 hasConceptScore W2022342783C195766429 @default.
- W2022342783 hasConceptScore W2022342783C204223013 @default.
- W2022342783 hasConceptScore W2022342783C204787440 @default.
- W2022342783 hasConceptScore W2022342783C2776401178 @default.
- W2022342783 hasConceptScore W2022342783C2779227376 @default.
- W2022342783 hasConceptScore W2022342783C41008148 @default.
- W2022342783 hasConceptScore W2022342783C41895202 @default.
- W2022342783 hasConceptScore W2022342783C49040817 @default.
- W2022342783 hasConceptScore W2022342783C53524968 @default.
- W2022342783 hasConceptScore W2022342783C62520636 @default.
- W2022342783 hasConceptScore W2022342783C71924100 @default.
- W2022342783 hasConceptScore W2022342783C78371743 @default.
- W2022342783 hasLocation W20223427831 @default.
- W2022342783 hasOpenAccess W2022342783 @default.
- W2022342783 hasPrimaryLocation W20223427831 @default.
- W2022342783 hasRelatedWork W1825295192 @default.
- W2022342783 hasRelatedWork W1986705012 @default.
- W2022342783 hasRelatedWork W1989062007 @default.
- W2022342783 hasRelatedWork W2006086410 @default.
- W2022342783 hasRelatedWork W2027095012 @default.
- W2022342783 hasRelatedWork W2031364729 @default.
- W2022342783 hasRelatedWork W2035734563 @default.
- W2022342783 hasRelatedWork W2052805415 @default.
- W2022342783 hasRelatedWork W2072073646 @default.
- W2022342783 hasRelatedWork W2081221563 @default.
- W2022342783 isParatext "false" @default.
- W2022342783 isRetracted "false" @default.
- W2022342783 magId "2022342783" @default.
- W2022342783 workType "article" @default.