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- W2022357211 abstract "The influence of proton irradiation on current–voltage characteristics, Nd − Na values and parameters of deep centres in 6H–SiC pn structures grown by sublimation epitaxy has been studied. The irradiation was carried out with 8 MeV protons in the range of doses from 1014 to 1016 cm−2. Irradiation with a dose of 3.6 × 1014 cm−2 leaves the voltage drop at high forward currents (10 A/cm2) practically unchanged. For higher irradiation dose of 1.8 × 1015 cm−2, the forward voltage drop and the degree of compensation in the samples increased ; partial annealing of the radiation defects and partial recovery of the electrical parameters occurred after annealing at T∼400–800 K. Irradiation with a dose of 5.4 × 1015 cm−2 resulted in very high resistance in forward biased pn structures which remained high even after heating to 500°C. It is suggested that proton irradiation causes decreasing of the lifetime and formation of an i- or an additional p-layer." @default.
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- W2022357211 date "1999-01-01" @default.
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- W2022357211 title "Doping of 6H–SiC pn structures by proton irradiation" @default.
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