Matches in SemOpenAlex for { <https://semopenalex.org/work/W2022360340> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2022360340 endingPage "4583" @default.
- W2022360340 startingPage "4583" @default.
- W2022360340 abstract "The characterization of electron cyclotron resonance (ECR) plasma with a hollow cathode target for sputtering has been performed with a Langmuir probe. The experiments were carried out at low pressures below 1.2×10 -3 Pa at which high ionization rates over 10% were obtained. An ion current density up to 10 mA cm -2 and a target current up to 700 mA were achieved when the input microwave power was 200 W. It was found that a negative bias applied to the target causes significant changes in the spatial distributions of electron density, electron temperature and plasma potential. When a negative bias over a certain value was applied, intense coherent temporal fluctuations in the ion saturation current were observed around the radial center of the plasma column." @default.
- W2022360340 created "2016-06-24" @default.
- W2022360340 creator A5018952359 @default.
- W2022360340 creator A5041246441 @default.
- W2022360340 creator A5087592679 @default.
- W2022360340 date "1997-07-01" @default.
- W2022360340 modified "2023-10-17" @default.
- W2022360340 title "Characteristics of an ECR Plasma Sputtering Source at Low Ar/N<sub>2</sub> Gas Pressures for Thin Film Synthesis" @default.
- W2022360340 cites W1989007816 @default.
- W2022360340 cites W1989074179 @default.
- W2022360340 cites W1998926747 @default.
- W2022360340 cites W2020411854 @default.
- W2022360340 cites W2042118863 @default.
- W2022360340 cites W2050319692 @default.
- W2022360340 cites W2060688034 @default.
- W2022360340 cites W2063804106 @default.
- W2022360340 cites W2066335865 @default.
- W2022360340 cites W2079332417 @default.
- W2022360340 cites W2093822123 @default.
- W2022360340 doi "https://doi.org/10.1143/jjap.36.4583" @default.
- W2022360340 hasPublicationYear "1997" @default.
- W2022360340 type Work @default.
- W2022360340 sameAs 2022360340 @default.
- W2022360340 citedByCount "1" @default.
- W2022360340 countsByYear W20223603402016 @default.
- W2022360340 crossrefType "journal-article" @default.
- W2022360340 hasAuthorship W2022360340A5018952359 @default.
- W2022360340 hasAuthorship W2022360340A5041246441 @default.
- W2022360340 hasAuthorship W2022360340A5087592679 @default.
- W2022360340 hasConcept C113196181 @default.
- W2022360340 hasConcept C121332964 @default.
- W2022360340 hasConcept C125485243 @default.
- W2022360340 hasConcept C145148216 @default.
- W2022360340 hasConcept C171250308 @default.
- W2022360340 hasConcept C175361016 @default.
- W2022360340 hasConcept C176118016 @default.
- W2022360340 hasConcept C178790620 @default.
- W2022360340 hasConcept C184779094 @default.
- W2022360340 hasConcept C185592680 @default.
- W2022360340 hasConcept C19067145 @default.
- W2022360340 hasConcept C192039680 @default.
- W2022360340 hasConcept C192562407 @default.
- W2022360340 hasConcept C198291218 @default.
- W2022360340 hasConcept C22175881 @default.
- W2022360340 hasConcept C22423302 @default.
- W2022360340 hasConcept C43503373 @default.
- W2022360340 hasConcept C43617362 @default.
- W2022360340 hasConcept C44838205 @default.
- W2022360340 hasConcept C62520636 @default.
- W2022360340 hasConcept C82706917 @default.
- W2022360340 hasConceptScore W2022360340C113196181 @default.
- W2022360340 hasConceptScore W2022360340C121332964 @default.
- W2022360340 hasConceptScore W2022360340C125485243 @default.
- W2022360340 hasConceptScore W2022360340C145148216 @default.
- W2022360340 hasConceptScore W2022360340C171250308 @default.
- W2022360340 hasConceptScore W2022360340C175361016 @default.
- W2022360340 hasConceptScore W2022360340C176118016 @default.
- W2022360340 hasConceptScore W2022360340C178790620 @default.
- W2022360340 hasConceptScore W2022360340C184779094 @default.
- W2022360340 hasConceptScore W2022360340C185592680 @default.
- W2022360340 hasConceptScore W2022360340C19067145 @default.
- W2022360340 hasConceptScore W2022360340C192039680 @default.
- W2022360340 hasConceptScore W2022360340C192562407 @default.
- W2022360340 hasConceptScore W2022360340C198291218 @default.
- W2022360340 hasConceptScore W2022360340C22175881 @default.
- W2022360340 hasConceptScore W2022360340C22423302 @default.
- W2022360340 hasConceptScore W2022360340C43503373 @default.
- W2022360340 hasConceptScore W2022360340C43617362 @default.
- W2022360340 hasConceptScore W2022360340C44838205 @default.
- W2022360340 hasConceptScore W2022360340C62520636 @default.
- W2022360340 hasConceptScore W2022360340C82706917 @default.
- W2022360340 hasIssue "7S" @default.
- W2022360340 hasLocation W20223603401 @default.
- W2022360340 hasOpenAccess W2022360340 @default.
- W2022360340 hasPrimaryLocation W20223603401 @default.
- W2022360340 hasRelatedWork W1997388833 @default.
- W2022360340 hasRelatedWork W2055907662 @default.
- W2022360340 hasRelatedWork W2062787641 @default.
- W2022360340 hasRelatedWork W2063771729 @default.
- W2022360340 hasRelatedWork W2077824680 @default.
- W2022360340 hasRelatedWork W2094019959 @default.
- W2022360340 hasRelatedWork W2443704810 @default.
- W2022360340 hasRelatedWork W2541109868 @default.
- W2022360340 hasRelatedWork W4367186977 @default.
- W2022360340 hasRelatedWork W2184476682 @default.
- W2022360340 hasVolume "36" @default.
- W2022360340 isParatext "false" @default.
- W2022360340 isRetracted "false" @default.
- W2022360340 magId "2022360340" @default.
- W2022360340 workType "article" @default.