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- W2022360752 abstract "本研究では, Sawyer型平面モータに多自由度位置検出機構であるサーフェスエンコーダを搭載した位置決めシステムを提案した. 2次元角度格子フィルムを用いることで, モータの構造に影響することなくサブミクロンオーダのクローズドループ制御を導入できる. 本報では微小位置決め実験により本システムの有効性を確かめたことを報告する." @default.
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- W2022360752 date "2005-01-01" @default.
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- W2022360752 title "Precision Positioning of a Sawyer Motor-driven Stage" @default.
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