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• W2022362765 abstract "After a general comparison of optical to non-optical diagnostics in MOVPE reactors, this paper describes in more detail the advantages and disadvantages of different optical techniques (e.g. absorption spectroscopy, laser induced fluorescence, Raman scattering, coherent anti-Stokes Raman scattering, opto-galvanic detection). Two main examples of gas phase diagnostics obtained by coherent anti-Stokes Raman scattering are then treated at length. The first deals with thermal stimulated growth and discusses gas phase and surface reactions of AsH3, Ga(CH3)3 and C4H9PH2. The second example describes time resolved studies performed on the excimer laser induced photodecomposition of AsH3 by using an excite and probe technique." @default.
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• W2022362765 date "1991-01-01" @default.
• W2022362765 modified "2023-10-01" @default.
• W2022362765 title "Gas phase studies of MOVPE by optical methods" @default.
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• W2022362765 doi "https://doi.org/10.1016/0022-0248(91)90429-9" @default.
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