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- W2022374497 abstract "Abstract In X-ray mask fabrication with absorber structuring on unthinned wafers it is important that all layers which cover the mask membrane, are homogeneous in thickness and composition. It is demonstrated in this paper that Si 3 N 4 layers (90 nm) with high stress (1×10 9 N/m 2 ) used as antireflective coatings create pattern distortions ⩾ 0.1 μm if thickness variations exceed ± 5% over an area of 25×25 mm 2 ." @default.
- W2022374497 created "2016-06-24" @default.
- W2022374497 creator A5001832678 @default.
- W2022374497 creator A5055798337 @default.
- W2022374497 creator A5067055968 @default.
- W2022374497 creator A5080948358 @default.
- W2022374497 date "1986-12-01" @default.
- W2022374497 modified "2023-09-27" @default.
- W2022374497 title "Influence of thin film thickness variations on pattern fidelity of X-ray masks" @default.
- W2022374497 cites W2038828567 @default.
- W2022374497 doi "https://doi.org/10.1016/0167-9317(86)90030-4" @default.
- W2022374497 hasPublicationYear "1986" @default.
- W2022374497 type Work @default.
- W2022374497 sameAs 2022374497 @default.
- W2022374497 citedByCount "1" @default.
- W2022374497 crossrefType "journal-article" @default.
- W2022374497 hasAuthorship W2022374497A5001832678 @default.
- W2022374497 hasAuthorship W2022374497A5055798337 @default.
- W2022374497 hasAuthorship W2022374497A5067055968 @default.
- W2022374497 hasAuthorship W2022374497A5080948358 @default.
- W2022374497 hasConcept C108406538 @default.
- W2022374497 hasConcept C120665830 @default.
- W2022374497 hasConcept C121332964 @default.
- W2022374497 hasConcept C127313418 @default.
- W2022374497 hasConcept C136525101 @default.
- W2022374497 hasConcept C142724271 @default.
- W2022374497 hasConcept C151730666 @default.
- W2022374497 hasConcept C159985019 @default.
- W2022374497 hasConcept C160671074 @default.
- W2022374497 hasConcept C171250308 @default.
- W2022374497 hasConcept C19067145 @default.
- W2022374497 hasConcept C192562407 @default.
- W2022374497 hasConcept C204787440 @default.
- W2022374497 hasConcept C2779227376 @default.
- W2022374497 hasConcept C2779328170 @default.
- W2022374497 hasConcept C2816523 @default.
- W2022374497 hasConcept C49040817 @default.
- W2022374497 hasConcept C55148256 @default.
- W2022374497 hasConcept C64297162 @default.
- W2022374497 hasConcept C66882249 @default.
- W2022374497 hasConcept C71924100 @default.
- W2022374497 hasConcept C97355855 @default.
- W2022374497 hasConceptScore W2022374497C108406538 @default.
- W2022374497 hasConceptScore W2022374497C120665830 @default.
- W2022374497 hasConceptScore W2022374497C121332964 @default.
- W2022374497 hasConceptScore W2022374497C127313418 @default.
- W2022374497 hasConceptScore W2022374497C136525101 @default.
- W2022374497 hasConceptScore W2022374497C142724271 @default.
- W2022374497 hasConceptScore W2022374497C151730666 @default.
- W2022374497 hasConceptScore W2022374497C159985019 @default.
- W2022374497 hasConceptScore W2022374497C160671074 @default.
- W2022374497 hasConceptScore W2022374497C171250308 @default.
- W2022374497 hasConceptScore W2022374497C19067145 @default.
- W2022374497 hasConceptScore W2022374497C192562407 @default.
- W2022374497 hasConceptScore W2022374497C204787440 @default.
- W2022374497 hasConceptScore W2022374497C2779227376 @default.
- W2022374497 hasConceptScore W2022374497C2779328170 @default.
- W2022374497 hasConceptScore W2022374497C2816523 @default.
- W2022374497 hasConceptScore W2022374497C49040817 @default.
- W2022374497 hasConceptScore W2022374497C55148256 @default.
- W2022374497 hasConceptScore W2022374497C64297162 @default.
- W2022374497 hasConceptScore W2022374497C66882249 @default.
- W2022374497 hasConceptScore W2022374497C71924100 @default.
- W2022374497 hasConceptScore W2022374497C97355855 @default.
- W2022374497 hasLocation W20223744971 @default.
- W2022374497 hasOpenAccess W2022374497 @default.
- W2022374497 hasPrimaryLocation W20223744971 @default.
- W2022374497 hasRelatedWork W1983764482 @default.
- W2022374497 hasRelatedWork W1998640486 @default.
- W2022374497 hasRelatedWork W2007644115 @default.
- W2022374497 hasRelatedWork W2009738414 @default.
- W2022374497 hasRelatedWork W2021742853 @default.
- W2022374497 hasRelatedWork W2039458470 @default.
- W2022374497 hasRelatedWork W2149178664 @default.
- W2022374497 hasRelatedWork W2515499554 @default.
- W2022374497 hasRelatedWork W3192287422 @default.
- W2022374497 hasRelatedWork W2745722218 @default.
- W2022374497 hasRelatedWork W2760676308 @default.
- W2022374497 hasRelatedWork W2820380031 @default.
- W2022374497 hasRelatedWork W2825942202 @default.
- W2022374497 hasRelatedWork W2845812707 @default.
- W2022374497 hasRelatedWork W2852299289 @default.
- W2022374497 hasRelatedWork W2874507053 @default.
- W2022374497 hasRelatedWork W2967125828 @default.
- W2022374497 hasRelatedWork W3072932473 @default.
- W2022374497 hasRelatedWork W3115958566 @default.
- W2022374497 hasRelatedWork W3148777546 @default.
- W2022374497 isParatext "false" @default.
- W2022374497 isRetracted "false" @default.
- W2022374497 magId "2022374497" @default.
- W2022374497 workType "article" @default.